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US 7,119,395 B2Granted
Memory cell with nanocrystals or nanodots
AssigneeInfineon Technologies AG
InventorsMartin Gutsche, Josef Willer, Cay-Uwe Pinnow, Ralf Symanczyk
Life of this patent
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Abstract
The storage layer (6) is in each case present above a region in which the channel region (3) adjoins a source/drain region (2) and is in each case interrupted above an intervening middle part of the channel region (3). The storage layer (6) is formed by material of the gate dielectric (4) and contains silicon or germanium nanocrystals or nanodots introduced through ion implantation. The gate electrode (5) is widened at the flanks by electrically conductive spacers (7).
Claims7
A memory cell comprising;
- first and second source/drain regions disposed at a top side of a semiconductor body through the introduction of dopant,
- a channel region provided between the first and second source/drain regions;
- a gate dielectric and a gate electrode arranged on the channel region, said gate electrode defining a source-side flank and a drain-side flank and arranged in a word line web comprising at least two word line layers;
- electrically conductive spacers arranged on said source-side flank and said drain-side flank of said gate electrode and electrically connected thereto, said electrically conductive spacers are arranged at the flanks of a first word line layer, further arranged at the bottom of the word line web and having at least one second word line layer projecting over said electrically conductive spacers;
- and
- a storage layer disposed above the transition or boundary between a channel region and at least one of the source/drain regions, the storage layer being interrupted above an intervening, central part of the channel region and, the storage layer being formed as a portion of the gate dielectric and containing nanocrystals or nanodots.
3 more elements
Dependencies are inferred from the claim text.