Electron beam device having a specimen holder

Abstract

An electron beam device having a specimen holder, in particular for a transmission electron microscope (TEM), which makes it possible to identify the specimen holder in a simple manner is described. Therefore, the electron beam device has at least one specimen holder having at least one holding element for holding a specimen and at least one identification unit. Furthermore, the electron beam device has a reading unit for reading the identification unit without contact, a goniometer, into which the specimen holder may be inserted, and a controller for controlling the movement modes of the goniometer, via which the movement modes of the goniometer are controlled on the basis of the identification data supplied by the identification unit and of corresponding data stored in the controller.

Dependencies are inferred from the claim text.