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US 7,118,996 B1Granted
Apparatus and method for doping
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Toshiji Hamatani, Koichiro Tanaka
Life of this patent
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Abstract
There is proposed an apparatus for doping a material to be doped by generating plasma (ions) and accelerating it by a high voltage to form an ion current is proposed, which is particularly suitable for processing a substrate having a large area. The ion current is formed to have a linear sectional configuration, and doping is performed by moving a material to be doped in a direction substantially perpendicular to the longitudinal direction of a section of the ion current.
Claims38
A doping method comprising:
- generating an ion current;
- separating said ion current on a mass basis into at least two ion currents, including a first ion current and a second ion current;
- accelerating said first ion current using an acceleration electrode;
- and
- radiating said accelerated first ion current and said second ion current to a same substrate at different angles,
- wherein, after said second ion current is separated, said second ion current is radiated to the substrate without accelerating the second ion current with the acceleration electrode.
3 more elements
A doping method comprising:
- generating an ion current having a cross section elongated in one direction;
- separating said ion current on a mass basis into at least two ion currents, including a first ion current and a second ion current;
- accelerating said first ion current using an acceleration electrode;
- and
- radiating said accelerated first ion current and said second ion current to a same substrate at different angles,
- wherein, after said second ion current is separated, said second ion current is radiated to the substrate without accelerating the second ion current with the acceleration electrode.
3 more elements
A doping method comprising:
- generating an ion current having a cross section elongated in one direction;
- separating said ion current on a mass basis into at least two ion currents, including a first ion current and a second ion current;
- accelerating said first ion current using an acceleration electrode;
- and
- radiating said accelerated first ion current and said second ion current to a same substrate at different angles, while moving said substrate along a direction perpendicular to said one direction,
- wherein, after said second ion current is separated, said second ion current is radiated to the substrate without accelerating the second ion current with the acceleration electrode.
3 more elements
A doping method comprising:
- generating an ion current having a cross section elongated in one direction;
- separating said ion current on a mass basis into at least two ion currents, including a first ion current and a second ion current;
- accelerating said first ion current using an acceleration electrode;
- radiating said accelerated first ion current and said second ion current to a same substrate at different angles so that penetration depths of ions of said first and second ion currents are substantially the same,
- wherein, after said second ion current is separated, said second ion current is radiated to the substrate without accelerating the second ion current with the acceleration electrode.
2 more elements
A doping method comprising:
- generating an ion current having a cross section elongated in one direction;
- separating said ion current on a mass basis into at least two ion currents, including a first ion current and a second ion current;
- accelerating said first ion current using an acceleration electrode;
- and
- radiating said accelerated first ion current and said second ion current to a same substrate at different angles so that penetration depths of ions of said first and second ion currents are substantially the same, while moving said substrate along a direction perpendicular to said one direction,
- wherein, after said second ion current is separated, said second ion current is radiated to the substrate without accelerating the second ion current with the acceleration electrode.
3 more elements
Dependencies are inferred from the claim text.