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US 7,118,982 B2Granted
Emitter and method of making
AssigneeHewlett-Packard Development Company, L.P.
InventorsAlexander Govyadinov, Michael J. Regan
Life of this patent
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Abstract
An emitter includes an electron source and a cathode. The cathode has an emissive surface. The emitter further includes a continuous anisotropic conductivity layer disposed between the electron source and the emissive surface of the cathode. The anisotropic conductivity layer has an anisotropic sheet resistivity profile and provides for substantially uniform emissions over the emissive surface of the emitter.
Claims2
A method of creating an emitter, comprising the steps of:
- applying a continuous anisotropic conductivity layer having an anisotropic conductivity profile onto the electron source by artificially assembling an array of emission sites with a serial back resistance, including the steps of,
- applying a layer of resistive material;
- applying a template on the layer of resistive material, the template defining the location of the emission sites;
- doping the templated resistive material to create a resistive layer with an anisotropic conductivity profile wherein the conductivity is highest in the thickness direction of the resistive layer to create a pn junction diode;
- and
- creating an emission source on the anisotropic conductivity layer.
3 more elements
A method of creating an emitter, comprising the steps of:
- applying a continuous anisotropic conductivity layer having an anisotropic conductivity profile onto the electron source by artificially assembling an array of emission sites with a serial back resistance, including the steps of,
- applying a layer of resistive material including applying a layer of epitaxial semiconductive material;
- applying a template on the layer of resistive material, the template defining the location of the emission sites;
- doping the templated resistive material to create a resistive layer with an anisotropic conductivity profile wherein the conductivity is highest in the thickness direction of the resistive layer;
- and
- creating an emission source on the anisotropic conductivity layer.
3 more elements
Dependencies are inferred from the claim text.