Methods of forming conductive lines
AssigneeMicron Technology, Inc.
InventorsScott A. Southwick, Alex J. Schrinsky, Terrence B. McDaniel
Life of this patent
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AssigneeMicron Technology, Inc.
InventorsScott A. Southwick, Alex J. Schrinsky, Terrence B. McDaniel
Estimating the term…
This invention includes methods of forming conductive lines, and methods of forming conductive contacts adjacent conductive lines. In one implementation, a method of forming a conductive line includes forming a conductive line within an elongated trench within first insulative material over a semiconductive substrate. The conductive line is laterally spaced from opposing first insulative material sidewall surfaces of the trench. The conductive line includes a second conductive material received over a different first conductive material. The second conductive material is recessed relative to an elevationally outer surface of the first insulative material proximate the trench. A second insulative material different from the first insulative material is formed within the trench over a top surface of the conductive line and within laterally opposing spaces received between the first insulative material and the conductive line. In one implementation, a conductive contact is formed adjacent to and insulated from the conductive line.
A method of forming a conductive line, comprising:
A method of forming a conductive line, comprising:
Dependencies are inferred from the claim text.