Fabrication method of thin-film transistor array with self-organized organic semiconductor

A method of manufacturing a thin film transistor array comprising switching thin film transistors, pixel electrodes, and connecting elements connecting the switching thin film transistors and the pixel electrodes, the method comprising steps of

• forming gate lines on a substrate;
• forming gate insulating film to cover the gate lines formed on the substrate;
• forming source and drain electrodes on the gate insulating film;
• performing locally a plasma process on a substrate having a hydrophobic area so as to define discrete hydrophilic and hydrophobic surfaces;
• forming a monolayer where a self-assembled monolayer is to be formed by exposing said hydrophilic and hydrophobic surfaces to a semiconductor vacuum deposition process such that an organic semiconductor material is only deposited as a semiconductor active layer having an island shape on a hydrophobic surface;
• forming a protective layer to cover the organic semiconductor island;
• and
• forming contact holes though the protective film.