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US 7,118,933 B2Granted
Method for manufacturing optical bench, optical bench, optical module, silicon wafer substrate in which wiring and groove are formed, and wafer
AssigneeHitachi Maxell, Ltd.
InventorsRyuzou Fukao, Tetsuhiko Sanbe
Life of this patent
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Abstract
An optical bench on which an optical component is mounted comprises an Si substrate made of a silicon wafer, a groove disposed on the Si substrate and designed to mount the optical component thereon, and a metal thin-film wiring for driving the optical component or a driver component. The metal thin-film wiring is formed in an electroless plating process before a groove manufacturing process which forms the groove by micromachining by means of wet processing.
Claims7
A method for manufacturing an optical bench that has an optical component mounted thereon, comprising:
- a plating process of forming a wiring pattern of a metal thin-film by electroless plating on a substrate;
- and subsequently
- a groove manufacturing process of manufacturing a groove by wet processing in the substrate having the wiring pattern formed by the plating process,
- wherein the groove manufacturing process removes an oxide film from the groove part of the substrate, and subsequently forms the groove in the part having the oxide film removed therefrom by dipping the substrate in a strong alkali solution.
1 more element
Dependencies are inferred from the claim text.