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US 7,118,932 B2Granted
Method of manufacturing waveguide type optical element and integrated optical waveguide type element using waveguide type optical element
AssigneeOki Electric Industry Co., Ltd.
InventorKoji Nakamura
Life of this patent
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Abstract
A method of manufacturing a waveguide type optical element wherein Zn is selectively diffused on a light absorption layer using an undoped InP layer. Since an impurity diffusion area is made on the light absorption layer under a ridge part, a depletion layer becomes thin in a thickness direction and an electric field can strongly be applied. Thereby, an extinction ratio characteristic of a device can be improved.
Claims17
A method of manufacturing a waveguide type optical element, comprising:
- forming a light absorption layer on a compound semiconductor layer;
- forming an undoped compound semiconductor layer on the light absorption layer, wherein the undoped compound semiconductor layer includes a first area, second areas located at both sides of the first area, third areas next to the second areas and fourth areas next to the third areas;
- removing the undoped compound semiconductor layer in the first area to expose a part of the light absorption layer;
- forming a clad layer on the exposed light absorption layer, and on the undoped compound semiconductor layer in the second, third and fourth areas;
- removing the clad layer located on the undoped compound semiconductor layer in the third areas, and the undoped compound semiconductor layer in the third areas;
- forming an insulating layer on the clad layer;
- and
- forming an electrode on the insulating layer.
5 more elements
A method of manufacturing a waveguide type optical element comprising:
- forming a light absorption layer on a compound semiconductor layer;
- forming an undoped compound semiconductor layer on the light absorption layer;
- forming a window in the undoped compound semiconductor layer to expose the light absorption layer;
- forming a clad layer on the undoped compound semiconductor layer and on the exposed light absorption layer in the window, an impurity within the clad layer diffusing through the window into the light absorption layer beneath the window;
- selectively removing the clad layer so that an inverted mesa shaped ridge portion of the clad layer remains above the window;
- forming an insulating layer over the clad layer after said selectively removing;
- and
- forming an electrode on the insulating layer.
5 more elements
Dependencies are inferred from the claim text.