Method of sealing a silicon nitride filter
AssigneeAsahi Glass Company, Limited
InventorNaomichi Miyakawa
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Abstract
A method for sealing a silicon nitride filter having a generally columnar outer shape and a plurality of through-holes mutually parallel to one another, extending between the opposing end surfaces, which comprises selectively packing a composition containing metal silicon particles in the vicinity of the opening of the through-holes to be sealed on each end surface, subjecting the silicon nitride filter to a heat treatment in a nitrogen atmosphere so that the metal silicon particles contained in the composition are nitrided and formed into silicon nitride for sealing.
Claims20
A method for sealing a silicon nitride filter having a generally columnar outer shape and a plurality of through-holes mutually parallel to one another, extending between the opposing end surfaces, which comprises
- selectively packing a composition containing metal silicon particles in the vicinity of the opening of the through-holes to be sealed on each end surface,
- subjecting the silicon nitride filter to a heat treatment in a nitrogen atmosphere so that the metal silicon particles contained in the composition are nitrided and formed into silicon nitride for sealing.
Dependencies are inferred from the claim text.