Electroplating reactor
AssigneeSemitool, Inc.
InventorsDaniel J. Woodruff, Kyle M. Hanson
Life of this patent
Estimating the term…
Abstract
A reactor for electroplating a workpiece includes a vessel having a ring contact arranged to support a workpiece in a horizontal orientation. In an embodiment of the invention, an electrode is arranged below the ring contact, and a pressing member is arranged above the ring contact to press a workpiece into electrical engagement with the ring contact. The vessel may be adapted to contain an electroplating fluid between a top of the ring contact and the electrode. In one embodiment, a movable intermediate workpiece support assembly is carried by the vessel, the support assembly being actuatable to lower a workpiece carried thereby to deliver the workpiece to be supported accurately and precisely on the ring contact.
Claims23
A reactor for electroplating a workpiece, comprising:
- a vessel;
- a ring contact within and carried by said vessel, the ring contact being arranged to support a workpiece in a substantially horizontal orientation;
- an electrode arranged below said ring contact;
- a pressing member arranged above said ring contact to press a workpiece onto said ring contact;
- said vessel configured to contain an electroplating fluid between a top of said ring contact and said electrode;
- an intermediate support assembly carried by said vessel and having workpiece supports, said assembly being actuatable to lower a workpiece carried thereby to said ring contact;
- and
- a reactor head, said reactor head coupled to said vessel to form a substantially enclosed chamber for electroplating a workpiece, said reactor head configured to uncouple from said reactor vessel in order to receive a workpiece, said reactor head having a workpiece gripping mechanism to receive and grip a workpiece and adapted to release the workpiece onto said intermediate support assembly.
A reactor for electroplating a workpiece, comprising:
- a vessel having an electrical contact arranged to support a workpiece in a substantially horizontal orientation wherein said electrical contact is a ring contact with a serrated top edge that allows fluid to pass between said ring contact and a workpiece supported thereon;
- an electrode arranged below said electrical contact;
- an intermediate support assembly carried by said vessel and having workpiece support surfaces for supporting a workpiece, said assembly being actuatable to lower a workpiece carried thereby to be supported on said electrical contact;
- and
- said vessel adapted to contain an electroplating fluid between a top of said electrical contact and said electrode.
A reactor for electroplating a workpiece, comprising:
- a vessel adapted to contain an electroplating fluid;
- an electrode arranged for fluid communication with electroplating fluid within the vessel;
- a ring contact carried by the vessel, the ring contact being arranged to electrically contact a workpiece and horizontally support the workpiece at a location for contact with the electroplating fluid;
- a reactor head arranged to carry a workpiece, the reactor head being moveable with respect to the vessel between a first position proximate the vessel and a second position spaced from the vessel to load and unload workpieces on the reactor head;
- and
- an intermediate support assembly carried by said vessel and having workpiece supports, said assembly being actuatable to lower a workpiece carried thereby to said ring contact, wherein said intermediate support assembly comprises a ring portion having spaced-apart, radially inwardly-directed workpiece supports, said ring portion being actuatable to translate vertically within said vessel.
A reactor for electroplating a workpiece, comprising:
- a vessel adapted to contain an electroplating fluid;
- an electrode arranged for fluid communication with electroplating fluid within the vessel;
- a ring contact carried by the vessel, the ring contact being arranged to electrically contact a workpiece and horizontally support the workpiece at a location for contact with the electroplating fluid, wherein said ring contact includes a plurality of contact terminals having plug portions pressed into sockets formed into a surface of said ring contact, and said terminals having terminal sockets for receiving an end of a conductor, and a sleeve covering said contact terminal externally of said ring contact, said sleeve sealed to said surface of said ring contact around said socket;
- a reactor head arranged to carry a workpiece, the reactor head being moveable with respect to the vessel between a first position proximate the vessel and a second position spaced from the vessel to load and unload workpieces on the reactor head;
- and
- intermediate workpiece supports, said workpiece supports being externally actuatable to lower a workpiece carried thereby to said ring contact.
Dependencies are inferred from the claim text.