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US 7,118,234 B2Granted
Reflective spatial light modulator
AssigneeMiradia Inc.
InventorsShaoher X Pan, Xiao Yang, Dongmin Chen, Shoucheng Zhang
Life of this patent
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Abstract
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.
Claims18
A micro mirror comprising:
- a mirror plate having an upper surface and a lower surface defining a mirror plate thickness;
- a frame coupled to the mirror plate, wherein the frame comprises a wall portion characterized by a wall height greater than the mirror plate thickness;
- and
- a hinge connected to the frame and the mirror plate for allowing the mirror plate to rotate relative to the frame about an axis defined by the hinge, wherein each of the mirror plate, the frame, and the hinge are fabricated from a single continuous piece of material.
1 more element
A spatial light modulator comprising:
- a plurality of micro-mirors in an array, each micro-mirror in the array having at least one mirror plate with an upper surface and a lower surface defining a mirror plate thickness and having at least one hinge connected to the at least one mirror plate of that micro-mirror for allowing that mirror plate to rotate;
- and
- a support frame with a plurality of support walls characterized by a wall height greater than the mirror plate thickness, each hinge connected to the at least one support wall, for supporting the hinge and the mirror plate and separating each mirror plate from a substrate connected to the support frame wherein the mirror plates, the support frame, and the hinges are fabricated from a single continuous piece of material.
Dependencies are inferred from the claim text.