Monitoring device and monitoring method for vacuum device

A method of supporting, monitoring and diagnosing maintenance and troubles related to a measuring device, said method comprising the steps of:

• recording and preserving data from operation monitoring sensors during a starting step and a measuring step of the measuring device in real time and synchronously;
• comparing current data received from the monitoring sensors during the measuring step with recorded data received from the monitoring sensors and being associated with initial operation or normal operation of the measuring device by overlapping the current data with the recorded data;
• selecting probable trouble cause items from pre-stored selection items on troubles and countermeasures against the troubles when there is a difference between the current data and the recorded data that indicates that maintenance is necessary or that an error has been detected;
• executing predetermined measures based on results of the selecting step to further diagnose the trouble causes so as to further specify the causes;
• and
• continuing the monitoring, maintenance and diagnosis of the device after the executing step.