Determining transmission of error effects for improving parametric performance
AssigneeAdvanced Micro Devices, Inc.
InventorsThomas J. Sonderman, Robert J. Chong, Brian K. Cusson, Alexander J. Pasadyn
Life of this patent
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Abstract
A method and an apparatus for characterizing an uncertainty factor relating to processing workpieces. A first processing step is performed upon a workpiece. A first uncertainty factor associated with the first processing step is calculated. A final uncertainty factor associated with an end-of-line parameter relating to the workpiece is calculated based upon the first uncertainty factor. A process control function based upon the final uncertainty factor is performed.
Claims33
A method, comprising:
- performing a first processing step upon a workpiece;
- determining a first uncertainty factor associated with said first processing step;
- determining a final uncertainty factor associated with an end-of-line parameter relating to said workpiece based upon said first uncertainty factor;
- and
- performing a process control function based upon said final uncertainty factor.
A method, comprising:
- performing a first processing step upon a workpiece;
- determining a first uncertainty factor associated with said first processing step;
- performing a second processing step upon said workpiece;
- determining a second uncertainty factor associated with said second processing step;
- determining a final uncertainty factor associated with an end-of-line parameter relating to said workpiece based upon said first and second uncertainty factors;
- and
- performing a process control function based upon said final uncertainty factor.
An apparatus, comprising:
- means for performing a first processing step upon a workpiece;
- means for determining a first uncertainty factor associated with said first processing step;
- means for determining a final uncertainty factor associated with an end-of-line parameter relating to said workpiece based upon said first uncertainty factor;
- and
- means for performing a process control function based upon said final uncertainty factor.
A system, comprising:
- a first processing tool to perform a first process upon a workpiece;
- a second processing tool to perform a second process upon said workpiece;
- a controller operatively coupled to said first and second processing tools, said controller for determining a first uncertainty factor associated with said first processing step, determining a second uncertainty factor associated with said second processing step, determining a final uncertainty factor associated with an end-of-line parameter relating to said workpiece based upon said first and second uncertainty factors, and performing a process control function based upon said final uncertainty factor.
An apparatus, comprising:
- a controller adapted to determine a first uncertainty factor associated with a first processing step performed on a workpiece, determine a second uncertainty factor associated with a second processing step performed on said workpiece, determine a final uncertainty factor associated with an end-of-line parameter relating to said workpiece based upon said first and second uncertainty factors, and performing a process control function based upon said final uncertainty factor.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:
- performing a first processing step upon a workpiece;
- determining a first uncertainty factor associated with said first processing step;
- determining a final uncertainty factor associated with an end-of-line parameter relating to said workpiece based upon said first uncertainty factor;
- and
- performing a process control function based upon said final uncertainty factor.
Dependencies are inferred from the claim text.