Automatic statistical process control (SPC) chart generation apparatus and method thereof

A method of automatic statistical process control (SPC) chart generation, the method comprising using a computer to perform the steps of:

• acquiring a plurality of process events and a plurality of parameter values corresponding to the process events and a process parameter;
• selecting a statistical algorithm for the parameter values according to a chamber management tree, a recipe window management tree, a parameter configuration table, the process events and the process parameters, wherein the chamber management tree stores a relationship between at least two of tool type, processing tool and tool chamber, the recipe window management tree stores a relationship between at least two of tool type, recipe, and sampling window, and the parameter configuration table stores information indicating that the statistical algorithm is applied in the entire process, recipe or tool chamber for the process parameter;
• creating a new chart profile record and a first parameter statistic record linking to the new chart profile record if the chart profile record corresponding to the process events and the process parameter is absent;
• and
• storing the statistical values in the first parameter statistic record.

A machine-readable storage medium storing a computer program which, when executed, directs a computer to perform a method of automatic statistical process control (SPC) chart generation, comprising the steps of:

• acquiring a plurality of process events and a plurality of parameter values corresponding to the process events and a process parameter;
• selecting a statistical algorithm for the parameter values according to a chamber management tree, a recipe window management tree, a parameter configuration table, the process events and the process parameters, wherein the chamber management tree stores a relationship between at least two of tool type, processing tool and tool chamber, the recipe window management tree stores a relationship between at least two of tool type, recipe, and sampling window, and the parameter configuration table stores information indicating that the statistical algorithm is applied in the entire process, recipe or tool chamber for the process parameter;
• creating a new chart profile record and a first parameter statistics record linked to the new chart profile record if the chart profile record corresponding to the process events and the process parameter is absent;
• and
• storing the statistical values in the first parameter statistics record.