Yield patrolling system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWoei-Chyi Kuo, Mingchu King, Shih-Tsung Liang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWoei-Chyi Kuo, Mingchu King, Shih-Tsung Liang
Estimating the term…
A yield patrolling system, which monitors production yield of a manufacturing line, has at least one product measurement and test device. The product measurement and test device measures yield determining parameters of product at completion of process steps executed by equipment within the manufacturing line. The system further has a test database in communication with the product measurement and test device to receive and retain the measured yield determining parameters. A statistical calculator is in communication with the test database to receive the measured yield determining parameters. The statistical calculator then calculates from the measured yield determining parameters production yield statistics indicating an amount of the product being fabricated on the manufacturing line. A yield-warning device is in communication with the statistical calculator to receive the production yield statistics and to provide a yield warning alert to a responsible person indicating that the manufacturing line is not fabricating product with a sufficient yield. Further, a yield information interface receives a compilation of the production yield statistics for each process step from the statistical calculator.
A system for the monitoring of production yield of a manufacturing line comprising:
A method for the monitoring of production yield of a manufacturing line comprising the steps of:
An apparatus for the monitoring of production yield of a manufacturing line comprising:
A computing system in communication with a manufacturing line for the monitoring of production yield of said manufacturing line comprising:
A medium for retaining a computer program which, when executed on a computing system, executes a process for the monitoring of production yield of a manufacturing line said process comprising the steps of:
Dependencies are inferred from the claim text.