Non-uniform density sample analyzing method, device and system

A non-uniform density sample analyzing device, comprising:

• function storage means for storing a scattering function which represents an X-ray scattering curve according to a fitting parameter which indicates a distribution state of particle-like matter;
• simulation means for calculating a simulated X-ray scattering curve in the same condition as a measurement condition of an actually measured X-ray scattering curve by using the scattering function stored in said function storage means;
• and
• fitting means for carrying out fitting between the simulated X-ray scattering curve and the actually measured X-ray scattering curve while changing the fitting parameter, and
• wherein the value of the fitting parameter when the simulated X-ray scattering curve agrees with the actually measured X-ray scattering curve serves to indicate the distribution state of the particle-like matter in a non-uniform density sample,
• wherein the actually measured X-ray scattering curve is an in-plane X-ray scattering curve obtained by in-plane diffraction measurement,
• wherein the fitting is carried out between the in-plane X-ray scattering curve and the simulated X-ray scattering curve,
• wherein the value of the fitting parameter when the simulated X-ray scattering curve agrees with the in-plane X-ray scattering curve serves to indicate the in-plane direction distribution state of the particle-like matter in the non-uniform density sample, and
• wherein said non-uniform density sample analyzing device is operable to analyze the in-plane direction distribution state of particle-like matter having at least one of non-uniform size and shape.

A non-uniform density sample analyzing system for analyzing a distribution state of particle-like matter in a non-uniform density sample, said system comprising:

• an in-plane diffraction measuring device which performs in-plane diffraction measurement of an actually measured X-ray scattering curve for the non-uniform density sample;
• and
• a non-uniform density sample analyzing device, said non-uniform density sample analyzing device comprising:
• function storage means for storing a scattering function which represents an X-ray scattering curve according to a fitting parameter which indicates a distribution state of particle-like matter;
• simulation means for calculating a simulated X-ray scattering curve in the same condition as a measurement condition of an actually measured X-ray scattering curve by using the scattering function stored in said function storage means;
• and
• fitting means for carrying out fitting between the simulated X-ray scattering curve and the actually measured X-ray scattering curve while changing the fitting parameter, and
• wherein the value of the fitting parameter when the simulated X-ray scattering curve agrees with the actually measured X-ray scattering curve serves to indicate the distribution state of the particle-like matter in a non-uniform density sample,
• wherein the actually measured X-ray scattering curve is an in-plane X-ray scattering curve obtained by in-plane diffraction measurement,
• wherein the fitting is carried out between the in-plane X-ray scattering curve and the simulated X-ray scattering curve,
• wherein the value of the fitting parameter when the simulated X-ray scattering curve agrees with the in-plane X-ray scattering curve serves to indicate the in-plane direction distribution state of the particle-like matter in the non-uniform density sample, and
• wherein said non-uniform density sample analyzing device is operable to analyze the in-plane direction distribution state of particle-like matter having at least one of non-uniform size and shape.