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US 7,116,544 B1Granted
Capacitor structure in a semiconductor device
AssigneeMarvell International Ltd.
InventorPantas Sutardja
Life of this patent
Estimating the term…
Abstract
A capacitor structure is provided that includes a substrate, a first group of conducting strip, a second group of conducting strips, a third group of conducting strips, and a fourth group of conducting strips. The capacitor structure can further include a first set of vertical vias, a second set of vertical vias, a third sect of vertical vias and a fourth set of vertical vias.
Claims18
An on chip capacitor comprising:
- a first layer comprising a first-layer first-polarity conducting strip and a first-layer second-polarity conducting strip,
- wherein the first-layer second-polarity conducting strip is arranged adjacent to and spaced apart from the first-layer first-polarity conducting strip,
- wherein the first-layer first-polarity conducting strip and the first-layer second-polarity conducting strip are arranged as respectively piecewise spirals;
- and
- a second layer comprising a second-layer first-polarity conducting strip and a second-layer second-polarity conducting strip,
- wherein the second-layer second-polarity conducting strip is arranged adjacent to and spaced apart from the second-layer first-polarity conducting strip,
- wherein the second-layer first-polarity conducting strip and the second-layer second-polarity conducting strip are arranged as respective piecewise spirals,
- wherein the second-layer second-polarity conducting strip is arranged overlying and electrically separated from the first-layer first-polarity conducting strip,
- wherein the second-layer first-polarity conducting strip is arranged overlying and electrically separated from the first-layer second-polarity conducting strip;
- wherein the first-layer first-polarity conducting strip electrically couples with the second-layer first-polarity conducting strip;
- and
- wherein the first-layer second-polarity conducting strip electrically couples with the second-layer second-polarity conducting strip.
9 more elements
An on-chip capacitor comprising:
- a first layer comprising a first-layer first-polarity conducting strip and a first-layer second-polarity conducting strip,
- wherein the first-layer second-polarity conducting strip is arranged adjacent to and spaced apart from the first-layer first-polarity conducting strip,
- wherein the first-layer first-polarity conducting strip and the first-layer second-polarity conducting strip are arranged as respective piecewise “S” shapes;
- and
- a second layer comprising a second-layer first-polarity conducting strip and a second-layer second-polarity conducting strip,
- wherein the second-layer second-polarity conducting strip is arranged to and spaced apart from the second-layer first-polarity conducting strip,
- wherein the second-layer first-polarity conducting strip and the second-layer second-polarity conducting strip are arranged as respective piecewise “S” shapes,
- wherein the second layer second-polarity conducting strip is arranged overlying and electrically separated from the first-layer first-polarity conducting strip,
- wherein the second-layer first-polarity conducting strip is arranged overlying and electrically separated from the first-layer second-polarity conducting strip;
- wherein the first-layer first-polarity conducting strip electrically couples with the second-layer first-polarity conducting strip;
- and
- wherein the first-layer second-polarity conducting strip electrically couples with the second-layer second-polarity conducting strip.
9 more elements
An on chip capacitor comprising:
- a first layer comprising a first-layer first-polarity conducting strip, a first-layer first base strip, a first-layer second-polarity conducting strip, and a first-layer second base strip,
- wherein the first-layer second-polarity conducting strip is arranged adjacent to and spaced apart from the first-layer first-polarity conducting strip,
- wherein the first-layer first-polarity conducting strip and the first-layer second-polarity conducting strip are arranged as respective “L” shapes, and
- wherein the “L” shaped first-layer first-polarity conducting strip connects with the first-layer first base strip and the “L” shaped first-layer second-polarity conducting strip connects with the first-layer second base strip,
- a second layer comprising a second-layer first-polarity conducting strip, a second-layer first base strip, and a second-layer second-polarity conducting strip, and a second-layer second base strip,
- wherein the second-layer second-polarity conducting strip is arranged adjacent to and spaced apart from the second-layer first-polarity conducting strip,
- wherein the second-layer first-polarity conducting strip and the second layer second polarity conducting strip are arranged as respective “L” shapes,
- wherein the “L” shaped second-layer first-polarity conducting strip connects with the second-layer first base strip and the “L” shaped second-layer second-polarity conducting strip connects with the second-layer second base strip,
- wherein the second-layer second-polarity conducting strip is arranged overlying and electrically separated from the first-layer first-polarity conducting strip,
- wherein the second-layer first-polarity conducting strip is arranged overlying and electrically separated from the first-layer second-polarity conducting strip;
- wherein the first-layer first-polarity conducting strip electrically couples with the second-layer first-polarity conducting strip;
- and
- wherein the first-layer second-polarity conducting strip electrically couples with the second-layer second-polarity conducting strip.
10 more elements
Dependencies are inferred from the claim text.