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US 7,116,501 B2Granted
Optical element holder, exposure apparatus, and device fabricating method
AssigneeCanon Kabushiki Kaisha
InventorEiji Sakamoto
Life of this patent
Estimating the term…
Abstract
An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element.
Claims11
An optical element holder for holding an optical element, said optical element holder comprising a holding element to hold the optical element or a holding part provided to the optical element unitedly,
- wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element, and
- wherein a difference between the heat transfer from the holding part to the holding element and the heat transfer from the holding element to the holding part is 1 W or smaller.
A device fabricating method comprising the steps of:
- exposing an object by using an exposure apparatus which includes an optical element, an optical element holder for holding the optical element which includes a holding element to hold the optical element or a holding part integrated with the optical element, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element, and
- an optical system for guiding light from a light source to an object, said optical system including the optical element;
- and developing the object that has been exposed.
Dependencies are inferred from the claim text.