Optical element holding system, barrel, exposure apparatus, and device manufacturing method

Abstract

A holding system for holding an optical element. The holding system includes a ring-like inner holding member, disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, in which the inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators, a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points, and three elastic members for supporting the holding member. The inner holding member supports the optical element by use of one pair of the pieces, which are disposed opposed to each other, in which one pair of the driving units of the inner holding member is disposed opposed to each other and provided on the inner holding member at two points. Each point is defined between the one pair of opposed pieces. The one pair of driving units is operable to apply a force to the optical element. The three elastic members are provided between the outer holding member and the inner holding member and symmetrically with respect to one of (i) a line that connects the one pair of opposed pieces with each other and (ii) a line that connects the one pair of opposed driving units with each other.

Dependencies are inferred from the claim text.