Distributed bragg reflector and method of fabrication
AssigneeAvago Technologies Fiber IP (Singapore) Pte. Ltd.
InventorsScott W. Corzine, Michael Renne Ty Tan, Chao Kun Lin, Jintian Zhu, Michael H. Leary
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Abstract
A distributed Bragg reflector and a method of fabricating the same incorporates a support for supporting the gaps against collapse. The method includes forming a plurality of alternating structure and sacrificial layers on a substrate. The structure and sacrificial layers are etched into at least one mesa protruding from the substrate. A support layer is formed on the at least one mesa leaving a portion of the structure and sacrificial layers exposed. At least a portion of at least one of the exposed sacrificial layers are etched from between the structure layers to form gaps between the structure layers.
Claims10
A method of fabricating a Bragg reflector comprising:
- forming at least one structure layer and at least one sacrificial layer in alternating relation on a substrate;
- etching the structure and sacrificial layers into at least one mesa protruding from the substrate;
- forming a support layer on the at least one mesa leaving a portion of the structure and the sacrificial layers exposed;
- and
- etching at least a portion of at least one of the exposed sacrificial layers to form a gap.
Dependencies are inferred from the claim text.