US 7,116,422 B2 · Wavelength modulation spectroscopy method and system

Abstract

In a wavelength modulation spectroscopy method and system the light of a tunable light source is modulated with a frequency f0, while the wavelength is swept over an interaction feature of a sample to be measured. The light of the light source is passed to a sample for interacting and thereafter detected and demodulated at a higher harmonic Nf0. To suppress effects of fluctuations of the optical transmission of the system on the measurement, originating from varying dust loads, high temperature, gas turbulence etc. in the measurement path (3), a burst signal in form of an envelope modulated pilot tone is added to the modulation of the light (1) of the light source (2) synchronously with the wavelength sweeps at a wavelength outside the interaction feature of the sample. The injected burst signal is at the detection frequency Nf0, where N≧2, and is detected together with the measured spectrum from the sample and act as absorption normal, which the spectrum can be calibrated against.

Claims6

Dependent claims

A wavelength modulation spectroscopy method, comprising:

periodically sweeping the wavelength of a light source over an interaction feature of a sample according to a sweep function;
modulating the wavelength of the light source with a frequency (f0), while the wavelength is swept over the interaction feature;
modulating the wavelength of the light source at a wavelength outside the interaction feature with a burst signal with a higher harmonic (Nf0) of said frequency (f0);
passing the light of the light source to the sample for interacting and thereafter to a measuring detector;
demodulating the measuring detector output at said higher harmonic (Nf0) of said frequency (f0);
passing a portion of the light of the light source to a monitor detector;
demodulating the monitor detector output at said higher harmonic (Nf0) of said frequency (f0);
and
calibrating the demodulated measuring detector output (S(ν)N,Meas) against the demodulated monitor detector output (S(ν)N,Mon) by the burst signal appearing in both demodulated detector outputs (S(ν)N,Meas, S(ν)N,Mon), respectively.

6 more elements

A wavelength modulation spectroscopy system, comprising:

a wavelength tunable light source;
a first modulation mechanism for periodically sweeping the wavelength of a light source over an interaction feature of a sample according to a sweep function;
a second modulation mechanism for modulating the wavelength of said light source with a frequency (f0), while the wavelength is swept over the interaction feature;
a third modulation mechanism for periodically modulating the wavelength of said light source at a wavelength outside the interaction feature with a burst signal with a higher harmonic (Nf0) of said frequency (f0);
a measuring detector for detecting the light of the light source after interaction with a sample and producing a measuring detector output;
a first demodulation mechanism for demodulating the detector output at a higher harmonic (Nf0) of said frequency (f0);
a monitor detector for detecting the light of the light source and producing a monitor detector output;
a second demodulation mechanism for demodulating the monitor detector output at said higher harmonic (Nf0) of said frequency (f0);
and
a calibration mechanism for calibrating the demodulated measuring detector output (S(ν)N,Meas) against the demodulated monitor detector output (S(ν)N,Mon) by the burst signal appearing in both demodulated detector outputs (S(ν)N,Meas, S(ν)N,Mon), respectively.

7 more elements

Dependencies are inferred from the claim text.

Wavelength modulation spectroscopy method and system

Life of this patent

Wavelength modulation spectroscopy method and system

Life of this patent

Abstract

Claims6