Method for manufacturing a panel of TFT LCD having particular TFT structure above pixel electrode
AssigneeQuanta Display Inc.
InventorHung-De Chen
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AssigneeQuanta Display Inc.
InventorHung-De Chen
Estimating the term…
A method for manufacturing a panel of a thin film transistor liquid crystal display device with three mask processes is disclosed. The method includes following steps: forming a transparent conductive layer, a first insulating layer, and a second metal layer on a transparent substrate in sequence; forming a source area, a drain area, a transparent electrode area, and data signal lines through a halftone photolithography and an etching; forming a semiconducting layer and a second insulating layer on the substrate in sequence; forming a semiconducting channel area in a thin film transistor area and contacts on the source area, the drain area, and the data signal lines through a photolithography and an etching; forming a third metal layer and a third insulating layer on the substrate in sequence; forming scanning signal lines and gate lines through a photolithography and an etching.
A method for manufacturing a panel of a thin film transistor liquid crystal display device, which has a thin film transistor area and a pixel electrode area within every pixel area defined by a plurality of data signal lines and scanning signal lines, comprising following steps:
Dependencies are inferred from the claim text.