Capacitance detecting device
AssigneeSeiko Epson Corporation
InventorsHiroaki Ebihara, Mitsutoshi Miyasaka, Hiroyuki Hara
Life of this patent
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Abstract
To provide a superior capacitance detecting device, a capacitance detecting device includes M row lines and N column lines that are arranged in a matrix, capacitance detecting elements provided at intersections therebetween, and power lines. The capacitance detecting element includes a signal detecting element and a signal amplifying element. The signal detecting element includes a capacitance detecting electrode, a capacitance detecting dielectric film, and a reference capacitor. The signal amplifying element is composed of a thin film semiconductor device having a gate electrode, a gate insulating film, and a semiconductor film, and an electrode of the reference capacitor is connected to the row line.
Claims21
A capacitance detecting device that reads surface contours of a target by detecting capacitance which changes according to a distance from the target, comprising:
- capacitance detecting elements arranged in a matrix of M rows and N columns;
- and
- a power line to supply power to the respective capacitance detecting elements, each of the capacitance detecting elements having:
- a) a signal detecting element to store electric charge corresponding to the capacitance;
- b) a reset element to reset the electric charge stored in the signal detecting element;
- and
- c) a signal amplifying element to amplify a signal corresponding to the electric charge stored in the signal detecting element,
- the signal detecting element having a capacitance detecting electrode,
- the signal amplifying element being composed of a thin film semiconductor device for signal amplification having a source electrode, a drain electrode, and a gate electrode,
- the reset element being composed of a thin film semiconductor device for reset having a source electrode, a drain electrode, and a gate electrode, and
- the gate electrode of the signal amplifying element, the capacitance detecting electrode, and the drain electrode of the reset element being connected to each other,
- wherein the gate electrode of the reset element is connected to a column line adjacent to a column line in which the capacitance detecting element having the reset element is positioned.
A capacitance detecting device that reads surface contours of a target by detecting capacitance which changes according to a distance from the target, comprising:
- M row lines and N column lines arranged in a matrix of M rows and N columns;
- capacitance detecting elements arranged at intersections of the row lines and the column lines;
- and
- power lines,
- each of the capacitance detecting elements having a signal detecting element, a signal amplifying element;
- and a reset element,
- the signal detecting element having a capacitance detecting electrode and a capacitance detecting dielectric film,
- the signal amplifying element being composed of a thin film semiconductor device for signal amplification having a source electrode, a drain electrode, and a gate electrode,
- the reset element being composed of a thin film semiconductor device for reset having a source electrode, a drain electrode, and a gate electrode,
- a ground potential being applied to the power line, and
- the gate electrode of the signal amplifying element, the capacitance detecting electrode, and the drain electrode of the reset element being connected to each other,
- wherein the gate electrode of the reset element is connected to a column line adjacent to a column line in which the capacitance detecting element having the reset element is positioned.
A capacitance detecting device that reads surface contours of a target by detecting capacitance which changes according to a distance from the target, comprising:
- capacitance detecting elements arranged in a matrix of M rows and N columns;
- and
- a plurality of power lines to supply power to the respective capacitance detecting elements, each of the capacitance detecting elements having:
- a) a signal detecting element to store electric charge corresponding to the capacitance;
- b) a reset element to reset the electric charge stored in the signal detecting element;
- and
- c) a signal amplifying element to amplify a signal corresponding to the electric charge stored in the signal detecting element,
- the signal detecting element including:
- a1) a capacitance detecting electrode;
- a2) a capacitance detecting dielectric film provided on the capacitance detecting electrode;
- and
- a3) a reference capacitor, the reference capacitor having a first electrode, a second electrode, and a dielectric film provided between the first electrode and the second electrode,
- the signal amplifying element being composed of a thin film semiconductor device for signal amplification having a source electrode, a drain electrode, and a gate electrode,
- the reset element being composed of a thin film semiconductor device for reset having a source electrode, a drain electrode, and a gate electrode, and
- the gate electrode of the signal amplifying element, the capacitance detecting electrode, the second electrode of the reference capacitor, and the drain electrode of the reset element being connected to each other, wherein
- the first electrode of the reference capacitor and a column line are connected to each other.
A capacitance detecting device that reads surface contours of a target by detecting capacitance which changes according to a distance from the target, comprising:
- M row lines and N column lines arranged in a matrix of M rows and N columns;
- capacitance detecting elements arranged at intersections of the row lines and the column lines;
- and
- a power line,
- each of the capacitance detecting elements having:
- a signal detecting element;
- a signal amplifying element;
- and
- a reset element,
- the signal detecting element having a capacitance detecting electrode, a capacitance detecting dielectric film, and a reference capacitor,
- the reference capacitor having a first electrode, a dielectric film, and a second electrode,
- the signal amplifying element being composed of a thin film semiconductor device for signal amplification having a source electrode, a drain electrode, and a gate electrode,
- the reset element being composed of a thin film semiconductor device for reset having a source electrode, a drain electrode, and a gate electrode,
- a ground potential being applied to the power lines, and
- the gate electrode of the signal amplifying element, the capacitance detecting electrode, the second electrode of the reference capacitor, and the drain electrode of the reset element being connected to each other,
- wherein the first electrode of the reference capacitor and a column line are connected to each other.
A capacitance detecting device that reads surface contours of a target by detecting capacitance which changes according to a distance from the target, comprising:
- capacitance detecting elements arranged in a matrix of M rows and N columns;
- and
- a plurality of power lines to supply power to the respective capacitance detecting elements, each of the capacitance detecting elements having:
- a) a signal detecting element to store electric charge corresponding to the capacitance;
- b) a reset element to reset the electric charge stored in the signal detecting element;
- and
- c) a signal amplifying element to amplify a signal corresponding to the electric charge stored in the signal detecting element,
- the signal detecting element including:
- a1) a capacitance detecting electrode;
- a2) a capacitance detecting dielectric film provided on the capacitance detecting electrode;
- and
- a3) a reference capacitor, the reference capacitor having a first electrode, a second electrode, and a dielectric film provided between the first electrode and the second electrode,
- the signal amplifying element being composed of a thin film semiconductor device for signal amplification having a source electrode, a drain electrode, and a gate electrode,
- the reset element being composed of a thin film semiconductor device for reset having a source electrode, a drain electrode, and a gate electrode, and
- the gate electrode of the signal amplifying element, the capacitance detecting electrode, the second electrode of the reference capacitor, and the drain electrode of the reset element being connected to each other,
- wherein the gate electrode of the reset element is connected to a column line adjacent to the column line in which the capacitance detecting element including the reset element is positioned.
A capacitance detecting device that reads surface contours of a target by detecting capacitance which changes according to a distance from the target, comprising:
- M row lines and N column lines arranged in a matrix of M rows and N columns;
- capacitance detecting elements arranged at intersections of the row lines and the column lines;
- and
- a power line,
- each of the capacitance detecting elements having:
- a signal detecting element;
- a signal amplifying element;
- and
- a reset element,
- the signal detecting element having a capacitance detecting electrode, a capacitance detecting dielectric film, and a reference capacitor,
- the reference capacitor having a first electrode, a dielectric film, and a second electrode,
- the signal amplifying element being composed of a thin film semiconductor device for signal amplification having a source electrode, a drain electrode, and a gate electrode,
- the reset element being composed of a thin film semiconductor device for reset having a source electrode, a drain electrode, and a gate electrode,
- a ground potential being applied to the power lines, and
- the gate electrode of the signal amplifying element, the capacitance detecting electrode, the second electrode of the reference capacitor, and the drain electrode of the reset element being connected to each other,
- wherein the gate electrode of the reset element being connected to a column line adjacent to the column line in which the capacitance detecting element including the reset element is positioned.
Dependencies are inferred from the claim text.