US 7,116,115 B2 · Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate

Abstract

A micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate are provided. The probe apparatus includes an integrated scanning tip and a dither actuation mechanism. The actuation is achieved using a bent-beam electrothermal actuator, and the probe tip is insulated from the actuator with a wide isolation gap. The device is fabricated by a modified micro electro-discharge machining process which allows electrical isolation within the micromachined structure using an epoxy plug. The apparatus may be used to measure changes in the external surface potential of a microfluidic channel as a function of varying pH of liquid inside the channel. The apparatus also may be used to map embedded charge in a thin layer on a substrate, showing it to be suitable for monitoring microelectronics manufacturing processes.

Claims12

Dependent claims

A micromachined probe apparatus for measuring surface potential of a sample in a non-invasive manner, the apparatus comprising:

a micromachined probe electrode having a probe tip disposed at a distal end thereof and providing an electrical signal based on surface potential of the sample when separation between the probe tip and the sample is varied, the probe tip and the sample forming a capacitor having a capacitance;
a micromachined actuator for moving the probe electrode relative to the sample in response to an electrical drive signal to vary the separation which varies the capacitance;
a dielectric part which mechanically connects and integrates the actuator and the probe tip but electrically insulates the actuator and the probe electrode, the dielectric part decoupling the electrical drive signal and the provided electrical signal from each other;
and
wherein the apparatus is a planar structure.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

10/852,058Filed 24 May 2004 · us provisional application

Priority

6 Jun 2003

Published

US 2005/0017172 A127 Jan 2005

Granted

3 Oct 2006

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

G01Q 30/14
Fluid environment: liquid environment
B23H 9/00
Machining specially adapted for treating particular metal objects or for obtaining special
B82Y 35/00
Methods or apparatus for measurement or analysis of nanostructures
G01N 27/002
Investigating or analysing materials by the use of electric, electrochemical, or magnetic means: by investigating the work function voltage

Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate

Life of this patent

Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate

Life of this patent

Abstract

Claims12