Method of forming a semiconductor device in a semiconductor layer and structure thereof
AssigneeFreescale Semiconductor, Inc.
InventorsAlexander Hoefler, Chi Nan Brian Li, Gowrishankar L. Chindalore
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AssigneeFreescale Semiconductor, Inc.
InventorsAlexander Hoefler, Chi Nan Brian Li, Gowrishankar L. Chindalore
Estimating the term…
In some embodiments, non-volatile memory (NVM) devices are formed on a silicon-on-insulator (SOI) substrate (12) by forming elevated sources and drains (56) in contact with extensions (46) within the top silicon layer (18) of the SOI substrate (12). Buried conductive regions (42) are formed within the top silicon layer (18) below the extensions (46) to mitigate floating body effects that occur when using SOI substrates. In other embodiments, NVM devices are formed using elevated sources and drains (56), extensions (46) and the buried conductive regions (42) in bulk semiconductor substrates. In any embodiment, logic devices may be formed in conjunction with NVM devices, wherein the logic and NVM devices have elevated sources and drains (56), extensions (46) and the buried conductive regions (42).
A semiconductor device formed in a first semiconductor layer having a top surface and a bottom surface, wherein the semiconductor device comprises:
Dependencies are inferred from the claim text.