Methods for electrically isolating portions of wafers

A method for electrically isolating a portion of a wafer comprising:

• providing a first wafer;
• forming a first conductor at least partially through the first wafer;
• disposing first dielectric material between the first conductor and material of the first wafer;
• and
• at least partially surrounding the first conductor and the first dielectric material with second dielectric material, the second dielectric material being spaced from the first dielectric material such that a first portion of the material of the first wafer is arranged between the first dielectric material and the second dielectric material and a second portion of the material of the first wafer is arranged outside an outer periphery of the second dielectric material,
• providing a second wafer;
• forming a first conductor at least partially through the second wafer;
• disposing first dielectric material between the first conductor and material of the second wafer;
• and
• at least partially surrounding the first conductor and the first dielectric material of the second wafer with second dielectric material, the second dielectric material of the second wafer being spaced from the first dielectric material of the second wafer such that a first portion of the material of the second wafer is arranged between the first dielectric material and the second dielectric material of the second wafer and a second portion of the material of the second wafer is arranged outside an outer periphery of the second dielectric material of the second wafer;
• and
• arranging the second wafer and the first wafer such that the first conductor of the first wafer and the first conductor of the second wafer electrically communicate with each other;
• wherein the first wafer has a first side and an opposing second side, and the first conductor extends through the first wafer from the first side to the second side, and further comprising:
• forming a second conductor through the first wafer from the first side to the second side, the second conductor being arranged between the first dielectric material and the second dielectric material;
• wherein the second wafer has a first side and an opposing second side, and the first conductor of the second wafer extends through the second wafer from the first side to the second side, and further comprising:
• forming a second conductor through the second wafer from the first side to the second side, the second conductor of the second wafer being arranged between the first dielectric material and the second dielectric material of the second wafer;
• and
• wherein the first wafer includes a second conductor formed through the first wafer from the first side to the second side, the second conductor of the first wafer being arranged between the first dielectric material and the second dielectric material of the first wafer, and the first wafer and the second wafer are bonded together to form a wafer stack, and further comprising:
• dicing the wafer stack to form a first die assembly and a second die assembly,
• the first die assembly including the first conductor of the first wafer, the first dielectric material of the first wafer, the first conductor of the second wafer, the first dielectric material of the second wafer, a first portion of the second dielectric material of the first wafer, and a first portion of the second dielectric material of the second wafer,
• the second die assembly including the second conductor of the first wafer, the second conductor of the second wafer, a second portion of the second dielectric material of the first wafer, and a second portion of the second dielectric material of the second wafer.

A method for electrically isolating a portion of a wafer comprising:

• providing a first wafer having a first side and an opposing second side;
• forming a first conductor through the first wafer from the first side to the second side;
• forming a first conductor insulating layer through the first wafer, the first conductor insulating layer engaging the first conductor and being located between the first conductor and material of the first wafer, the first conductor insulating layer being formed of dielectric material;
• and
• forming a first outer insulating layer through the first wafer from the first side to the second side and spaced from the first conductor insulating layer such that the first outer insulating layer at least partially electrically isolates the first conductor from portions of the first wafer located outside the first outer insulating layer, the first outer insulating layer being formed of dielectric material;
• and
• forming a second outer insulating layer through the first wafer from the first side to the second side and spaced from the first outer insulating layer such that the first outer insulating layer is arranged between the second outer insulating layer and the first conductor insulating layer, the second outer insulating layer being formed of dielectric material.