Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system

An interlocking system comprising:

• a comparator which compares a first relative value of a positive voltage from a positive power supply and a second relative value of a negative voltage from a negative power supply;
• a switching unit which changes a mode of the positive and negative power supplies;
• and
• a signal generating unit which generates an interlocking signal to interrupt an ion implantation process.

An apparatus for interrupting an ion implantation process comprising:

• a detecting unit which detects a positive voltage from a positive power supply and a negative voltage from a negative power supply;
• a comparator which compares a first relative value of the positive voltage and a second relative value of the negative voltage;
• a switching unit which changes a mode of the positive and negative power supplies;
• and
• a signal generating unit which generates an interlocking signal which interrupts the ion implantation process when a sum of the first relative value and the second relative value does not equal zero.

An apparatus for interlocking power to ion implantation equipment comprising:

• a positive power supply which generates a positive voltage;
• a negative power supply which generates a negative voltage;
• a comparator which compares a first relative value of the positive voltage and a second relative value of the negative voltage;
• and
• a signal generating unit which generates an interlocking signal to interlock the positive and the negative power supplies when a sum of the first relative value and the second relative value does not equal zero.