Crystalline thin film and process for production thereof, element employing crystalline thin film, circuit employing element, and device employing element or circuit
AssigneeCanon Kabushiki Kaisha
InventorsHideya Kumomi, Hidemasa Mizutani, Shigeki Kondo
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Abstract
A process for producing a crystalline thin film is provided which comprises melting and resolidifying a starting thin film having regions different in the state coexisting continuously. A small region of the starting thin film has a size distribution of number concentration of crystal grains or crystalline clusters different from that of the surrounding region. In the process of melting and resolidification, the crystal grain grows preferentially in the one region to control the location of the crystal grain in the crystalline thin film.
Claims31
A process for producing a crystalline thin film, comprising the steps of:
- preparing a thin film having multiple amorphous regions coexisting continuously, the multiple amorphous regions differing in state from one another;
- melting the multiple amorphous regions coexisting continuously;
- and
- resolidifying the multiple amorphous regions to grow at least a crystal grain or crystalline cluster at a location defined by the multiple amorphous regions.
A process for producing a crystalline thin film, comprising the steps of:
- preparing a thin film having a predetermined amorphous region differing in state from a surrounding amorphous region;
- irradiating an energy to both of the predetermined amorphous region and the surrounding amorphous region to melt the regions;
- and
- cooling to resolidify the regions to grow at least a crystal grain or crystalline cluster at a location defined by the predetermined amorphous region.
A process for producing a crystalline film, comprising the steps of:
- preparing a film having a first amorphous region and a second amorphous region adjoining the first amorphous region;
- melting the first and second amorphous regions;
- and
- resolidifying the first and second amorphous regions,
- wherein a concentration of a crystal grain or crystalline cluster contained in the first amorphous region is higher than that contained in the second amorphous region, and the crystal preferentially grows in the first amorphous region in said resolidifying step.
A process for producing a crystalline film, comprising the steps of:
- preparing a film having multiple amorphous regions coexisting continuously, the multiple amorphous regions differing in amorphous state from one another;
- melting the multiple amorphous regions coexisting continuously;
- and
- solidifying the multiple amorphous regions.
A process for producing a crystalline film, comprising the steps of:
- preparing a film having a first amorphous region differing in amorphous state from a second amorphous region adjoining the first amorphous region;
- melting the first and second amorphous regions;
- and
- solidifying the regions so that a crystal growth preferentially occurs in the first amorphous region.
Dependencies are inferred from the claim text.