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US 7,115,437 B2Granted
Micromachined device having electrically isolated components and a method for making the same
AssigneeGeorgia Tech Research Corporation
InventorsMark G. Allen, Charles C. Chung
Life of this patent
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Abstract
A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.
Claims8
A method, comprising the steps of:
- providing a substrate having a doped region formed by thermomigrating a dopant through said substrate, said substrate having a first region and a second region, said first region electrically isolated from said second region by said doped region;
- and
- simultaneously applying a first voltage to said first region and a second voltage to said second region such that said first region moves with respect to said second region.
A method, comprising the steps of:
- providing a substrate having a doped region formed by thermomigrating a dopant through said substrate, said substrate having a first region and a second region, said first region separated from said second region by said doped region and a gap within said substrate;
- and
- simultaneously applying a first voltage to said first region and a second voltage to said second region thereby causing said first region to move with respect to said second region,
- wherein said doped region has sufficient electrical properties for restricting current from flowing between said first and second regions when said first voltage is applied to said first region and said second voltage is applied to said second region.
1 more element
Dependencies are inferred from the claim text.