Method and apparatus for stacking semiconductor wafers
AssigneeNational Semiconductor Corporation
InventorsRoger Sarver, Dennis Moffat MacDonald
Life of this patent
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Abstract
An apparatus for stacking semiconductor wafers comprises a housing configured to releasably maintain a plurality of semiconductor wafers in fixed positions relative to the housing. The apparatus also includes a transfer guide proximate to the housing, the transfer guide configured to facilitate the transfer of the plurality of semiconductor wafers into the housing. Also included is a member configured to detach the semiconductor wafers from the housing so as to collect the semiconductor wafers into a stack.
Claims12
An apparatus for stacking semiconductor wafers, comprising:
- a housing having:
- an open top and open bottom enabling access to an interior cavity of the housing,
- an open side enabling access to the interior cavity, and
- the interior cavity having a plurality of supports spaced at fixed vertical intervals inside the housing enabling a plurality of wafers to be horizontally supported in a vertically spaced apart arrangement, the supports further adapted to enable the plurality of semiconductor wafers to be raised upwardly out of the housing;
- a transfer guide proximate to the open side of the housing, the transfer guide having a plurality of supporting splines arranged in registry with the supports of the housing such that wafers can be slid directly from the splines to an associated set of supports;
- a receptacle for receiving a cassette in a position enabling alignment with the transfer guide, such alignment arranging the wafers such that they are in alignment with the splines of the transfer guide thereby enabling the wafers to be slid directly from the cassette onto an associated set of splines of the transfer guide;
- and
- an elevator configured to pass upwardly through the open bottom of the housing detaching the semiconductor wafers from the supports and the housing and lifting the wafers upwardly to collect the semiconductor wafers into a stack.
A method of stacking semiconductor wafers, comprising:
- providing a plurality of semiconductor wafers arranged in a cassette;
- providing a wafer stacking apparatus having a housing with an interior cavity that includes a side opening and top and bottom openings and includes supports arranged in the interior cavity that are configured to releasably support the plurality of semiconductor wafers in a vertically separated arrangement, the apparatus further including a transfer guide positioned adjacent to the side opening of the housing and having transfer slots aligned with associated supports of the housing arranged to facilitate the transfer of the wafers from the cassette through the transfer guide into the housing through the side opening and onto the supports;
- arranging the cassette on the wafer stacking apparatus such that it is positioned proximal to the transfer guide and arranged so that the wafers in the cassette are in alignment with transfer slots of the transfer guide;
- transferring the plurality of semiconductor wafers into the housing by horizontally pushing the wafers onto the transfer slots of the transfer guide and through the transfer guide to direct the wafers through the side opening of the housing onto the supports so that the wafers are releasably held by the supports within the housing;
- releasing the plurality of semiconductor wafers from the supports by lifting the wafers upwardly from the supports thereby collecting the plurality of semiconductor wafers into a stack.
Dependencies are inferred from the claim text.