Friction fit target assembly for high power sputtering operation

In a method of preparing a bonded sputter target/backing plate assembly comprising a target composed of a metal or alloy to be sputtered and an underlying metallic backing plate member, the method for joining said target and backing plate along mating surfaces thereof, comprising:

• a) forming a plurality of male projections in at least one of said mating surfaces and a plurality of female grooves in said other of said mating surfaces;
• b) positioning said target and backing plate adjacent each other, the target and backing plate having an interface defined by said mating surfaces, said target comprising material selected from the group consisting of Ti, Co, Ta and alloys thereof, and said backing plate selected from the group consisting of CuCr, Ti, Ti alloy, Cu, and CuNi;
• and
• c) pressure consolidating said assembly under low temperature conditions of less than about 100OC so that said male projections are friction tit into said female grooves, and
• d) bonding said assembly proximate a peripheral boundary of said assembly, and further includes interposing an insert between the target and backing plate proximate the peripheral boundary of said assembly prior to bonding.