Back to results
US 7,114,641 B2Granted
Drip resistant dispensing nozzle
AssigneeIntel Corporation
InventorJason B. Zanotti
Life of this patent
Estimating the term…
Abstract
A dispensing nozzle method and apparatus is provided that may help in reducing the number of defects in integrated circuits during the manufacturing process. In one embodiment, the nozzle is configured such that at least a portion of the end of the nozzle that dispenses fluid can increase and decrease with a change in pressure, which may help to control fluid drips when the nozzle is not dispensing.
Claims19
A dispensing nozzle, comprising:
- a substantially flexible body, the body having a first end, a second end, a wall having an inner portion and an outer portion, the inner portion defining an interior cavity, and a plurality of capillaries disposed on the exterior portion;
- wherein the first end is configured to coupled the nozzle to a fluid source to accept a fluid into the interior cavity,
- the second end is configured to dispense the received fluid,
- the capillaries are configured to couple the nozzle to a pressure control source to selectively affect a pressure change partially or completely within the wall, and
- the wall is configured to reduce at least a portion of the interior cavity in volume responsive to the pressure change.
2 more elements
A photolithography system, comprising:
- a photoresist applicator;
- an exposure source coupled to the photoresist applicator;
- a nozzle carrier coupled to the photoresist applicator;
- and
- a dispensing nozzle coupled to the nozzle carrier, the dispensing nozzle comprising:
- a substantially flexible body, the body having a first end configured to couple to a fluid source, a second end configured to dispense fluid, and an interior cavity, the interior cavity configured to allow at least a portion of the interior cavity to decrease in diameter in response to a pressure change.
3 more elements
A method for dispensing fluid in a photolithography process, comprising:
- providing a nozzle having:
- a substantially flexible body, the body having a first end, a second end, a wall having an inner portion and an outer portion, the inner portion defining an interior cavity, and a plurality of capillaries disposed on the exterior portion;
- wherein the first end is configured to couple the nozzle to a fluid source to accept a fluid into the interior cavity,
- the second end is configured to dispense the received fluid, the capillaries are configured to couple the nozzle to a pressure control source to selectively affect a pressure change partially or completely within the wall, and
- the wall is configured to reduce at least a portion of the interior cavity in volume responsive to the pressure change;
- coupling the first end to a fluid source having a fluid selected from a group consisting of a photoresist, a developer solution, a rinse solution, and water;
- and
- decreasing the diameter of a portion of the interior cavity at the second end by changing the pressure to dispense the selected fluid.
5 more elements
Dependencies are inferred from the claim text.