Method for producing a 3-D micro flow cell and a 3-D micro flow cell
AssigneeGesim Gesselschaft fur Silizium-Mikrosysteme mbH
InventorsSteffen Howitz, Guenther Fuhr
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Abstract
A 3D micro flow cell is fabricated by forming a first spacer on a substrate to define the flow channel of the cell extending between inlet and outlet openings. A second spacer, comprising a pasty adhesive is applied outside the first spacer or in a groove on the first spacer to seal the cell when the first substrate is joined to a second substrate.
Claims11
A method of producing a 3D micro flow cell having a flow channel arranged between an upper and a lower substrate and connected to inlet and outlet fluid passages, wherein at least one of said substrates includes electrode structure having external electrical connections, comprising:
- applying a first spacer defining opposite sides of said flow channel and permanently fixed to a first substrate;
- applying non-compressible shims on at least one of said substrates to define a separation of said substrates;
- applying a second spacer comprising a pasty adhesive with uniform thickness to one of said substrates, said second spacer being formed outside of said flow channel;
- and
- positioning a second substrate over said first substrate and joining said substrates by applying one of force and heat to seal said flow channel.
Dependencies are inferred from the claim text.