Liner for use in processing chamber
AssigneeMicron Technology, Inc.
InventorKevin G. Donohoe
Life of this patent
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Abstract
A container for use in a processing chamber to lessen the amount of contaminant particles found within the chamber after processing. The container fits closely within the chamber and includes ports for a gas conduit and a vacuum conduit. The container may be locked to the chamber through a locking mechanism and a recess in the container. The container may be guided into the chamber with a plurality of chamfers. The container may be used in inductively coupled plasma chambers, electron cyclotron resonance chambers, and chambers capable of receiving microwaves.
Claims11
A method of processing a workpiece, said method comprising the steps of:
- locating the workpiece in a container, said container having at least one wall, a first access door to an interior space, at least one vacuum port and a gas port;
- moving said container into a processing chamber, said processing chamber having at least one wall, a second access door to an interior space, a vacuum port and a gas port;
- processing the workpiece, said processing step comprising producing inductively coupled plasma reactions;
- and
- removing said container from said processing chamber.
A method of processing a workpiece, said method comprising the steps of:
- locating the workpiece in a container, said container having at least one wall, an access door to an interior space, at least one vacuum port and a gas port;
- locking said container at a predetermined position within a processing chamber, said processing chamber having at least one wall, an access port to an interior space, a vacuum port and a gas port;
- processing the workpiece;
- and
- removing said container from the processing chamber.
A method of processing a workpiece, said method comprising the steps of:
- locating the workpiece in a container, said container having at least one wall, a first access door to an interior space, at least one vacuum port and a gas port;
- moving said container into a processing chamber, said processing chamber having at least one wall, a second access door to an interior space, a vacuum port and a gas port;
- aligning said processing chamber vacuum port with said container vacuum port;
- sealing said processing chamber vacuum port and said container vacuum port;
- processing the workpiece;
- and
- removing said container from said processing chamber.
Dependencies are inferred from the claim text.