Adapter manifold with dual valve block
OwnerDavid James Silvainventor
Life of this patent
Estimating the term…
Abstract
An adapter manifold comprising a first dual valve block having a first diaphragm valve and a second diaphragm valve; a first, a second, and a third low dead space connector for connecting the adapter manifold with dual valve block to the remaining portions of the chemical delivery system; a first conduit for connecting both the diaphragm side of the first diaphragm valve and the seat side of the second diaphragm valves to the first low dead space connector; a second conduit for connecting the seat side of the first diaphragm valve to the second low dead space connector; and a third conduit for connecting the diaphragm side of the second diaphragm valve to the third low dead space connector.
Claims7
A dual valve block comprising:
- a first diaphragm valve and a second diaphragm valve, each diaphragm valve having a diaphragm and a chamber, the chamber comprising a seat port substantially coaxial with the diaphragm and a diaphragm port in a peripheral position in relation to the seat port;
- a first conduit for connecting the diaphragm port of the first diaphragm valve and the seat port of the second diaphragm valve to a first connector;
- a second conduit for connecting the seat port of the first diaphragm valve to a second connector;
- and
- a third conduit for connecting the diaphragm port of the second diaphragm valve to a third connector,
- wherein the diaphragm port of the of the first diaphragm valve is juxtaposed to and in direct flow communication with the seat port of the second diaphragm valve, and
- wherein flow through the dual valve block is prevented when either of the first or the second diaphragm valves is in a closed condition.
An adapter manifold with dual valve block comprising:
- a dual valve block comprising a first diaphragm valve and a second diaphragm valve, each diaphragm valve having a diaphragm and a chamber, the chamber comprising a seat port substantially coaxial with the diaphragm and a diaphragm port in a peripheral position in relation to the seat port;
- a first low dead space connector for detachably connecting the dual valve block to a first source, wherein the first source is a container for storing a high purity chemical;
- a second low dead space connector for detachably connecting the dual valve block to a second source, wherein the second source is a process tool, a second container for storing the high purity chemical, a source of gas, or a source of vacuum;
- and
- a third low dead space connector for detachably connecting the dual valve block to a third source, wherein the third source is a source of vent, or a source of vacuum,
- wherein the dual valve block further comprises,
- a first conduit for connecting the diaphragm side of the first diaphragm valve and the seat side of the second diaphragm valve to the first low dead space connector,
- a second conduit for connecting the seat side of the first diaphragm valve to the second low dead space connector, and
- a third conduit for connecting the diaphragm side of the second diaphragm valve to the third low dead space connectors,
- wherein the diaphragm side of the of the first diaphragm valve is juxtaposed to and in direct flow communication with the seat side of the second diaphragm valve, and
- wherein flow through the dual valve block is prevented when either of the first or the second diaphragm valves is in a closed condition.
Dependencies are inferred from the claim text.