System and method for a mass flow controller
AssigneeCelerity Group, Inc.
InventorsJohn M Lull, Chiun Wang, William S Valentine, Joseph A Saggio, Jr.
Life of this patent
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Abstract
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
Claims13
A method of determining a displacement of a valve having a valve inlet to receive a flow of fluid at an inlet pressure and a valve outlet to provide the flow of fluid at an outlet pressure, the method comprising acts of:
- (A) selecting an intermediate pressure between the inlet pressure and the outlet pressure;
- (B) determining a first displacement of the valve based upon a viscous pressure drop from the inlet pressure to the intermediate pressure;
- (C) determining a second displacement of the valve based upon an inviscid pressure drop from the intermediate pressure to the outlet pressure;
- (D) determining whether the first displacement is approximately equal to the second displacement;
- and
- (E) selecting, one of the first displacement and the second displacement as the displacement of the valve when the first displacement is approximately equal to the second displacement.
Dependencies are inferred from the claim text.