Planar resonant tunneling sensor and method of fabricating and using the same
AssigneeAgilent Technologies, Inc.
InventorsPhilip W. Barth, Derek Stein, Curt Flory, Rick Pittaro, Daniel Roitman
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Abstract
Planar resonant tunneling sensor devices and methods for using the same are provided. The subject devices include first and second electrodes present on a surface of a planar substrate and separated from each other by a nanodimensioned gap. The devices also include a first member for holding a sample, and a second member for moving the first member and planar resonant tunneling electrode relative to each other. Also provided are methods of fabricating such a device and methods of using such a device for improved detection and characterization of a sample.
Claims18
A sensor device comprising:
- a first electrode presenting a planar surface at a planar surface of a substrate;
- a second electrode presenting a planar surface at said planar surface of said substrate and spaced apart by a gap from said first electrode, wherein said gap has a width ranging in length from about 1 nm to about 8 nm;
- a first member capable of holding a sample under test;
- and
- a second member attached to said first member and capable of moving said sample under test over said gap in relative direction from said first electrode to said second electrode.
Dependencies are inferred from the claim text.