Cryopump with two-stage pulse tube refrigerator
AssigneesSHI-APD Cryogenics, Inc., Sumitomo Heavy Industries, Ltd.
InventorJin Lin Gao
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Abstract
Disclosed is a two-stage pulse tube cryopump cooling system in which the pulse tubes and valves are inline, with the hot ends of the pulse tubes at the top and the valve mechanism is at the bottom and the hot ends and buffer volume are cooled by an inline coolant line from the compressor input to the compressor output and attached in heat exchange relationship with the buffer volume.
Claims7
An inline two-stage pulse tube cryopump cooling system with interphase control comprising a cryopump, a cryopump housing having a cryopump inlet in the housing, a compressor, first stage and second stage pulse tube assemblies each comprising a pulse tube, a regenerator, and a cold heat station,
- a first stage cryopanel attached to said first stage cold heat station, a second stage cryopanel attached to said second stage cold heat station,
- and an associated valve assembly, where the pulse tubes and regenerators are located inline and vertically, the hot ends of the pulse tubes are at the top, the hot ends are in the cryopump housing, and the pulse tube assemblies are removable from the cryopump housing.
Dependencies are inferred from the claim text.