Patterned substrate with hydrophilic/hydrophobic contrast, and method of use
AssigneeInternational Business Machines Corporation
InventorsHo-Cheol Kim, Robert Dennis Miller
Life of this patent
Estimating the term…
Abstract
A gas phase species (such as ozone, H2O2, or N2O) is photodissociated with ultraviolet light into a reactive species that is patternwise directed (e.g., through a mask) onto a surface of a material, such as an organosilicate. The reactive species reacts with the material to form a polar oxidation product such as —OH, thereby resulting in discrete hydrophilic regions separated from each other by hydrophobic regions. The degree of hydrophilicity of the discrete regions may be tailored by controlling the concentration of the reactive species, the ultraviolet light intensity, the temperature to which the material is heated, and exposure time. End products made with the methods are suitable for use in a biomolecular array.
Claims35
A method of forming discrete hydrophilic regions, comprising:
- photodissociating a gas phase species to generate a reactive species;
- and
- patternwise directing the reactive species onto preselected regions of a surface of a material to increase the hydrophilicity of said preselected regions, wherein the gas phase species includes at least one of N2O, H2O2, RO2H, RO2R′, and RCO3R′, in which R and R′ are alkyl or aryl substituents.
A method of forming discrete hydrophilic regions, comprising:
- irradiating a gas phase species to generate a reactive species;
- and patternwise directing the reactive species onto a surface of a material to form thereon discrete regions that are more hydrophilic than are other regions on the surface that are adjacent to said discrete regions, wherein the gas phase species is selected from the group consisting of H2O2, N2O, RO2H, RO2R′, and RCO3R′, in which R and R′ are alkyl or aryl substituents.
A method of forming regions of varying hydrophilicity, comprising:
- irradiating a gas phase species to generate a reactive species;
- patternwise directing the reactive species onto preselected regions of a material, the reactive species reacting with the material to increase the hydrophilicity of said preselected regions;
- and controlling said reacting to tailor the degree to which said preselected regions are hydrophilic, wherein said irradiating a gas phase species includes photodissociating the gas phase species wherein the gas species includes at least one of N2O, H2O2, RO2R′, and RCO3R′, in which R and R′ are alkyl or aryl substituents.
A method of forming regions of varying hydrophilicity, comprising:
- irradiating a gas phase species to generate a reactive species;
- patternwise directing the reactive species onto preselected regions of a material, the reactive species reacting with the material to increase the hydrophilicity of said preselected regions;
- and
- controlling said reacting to tailor the degree to which said preselected regions are hydrophilic, said controlling including controlling the concentration of the reactive species.
A method of forming regions of varying hydrophilicity, comprising:
- irradiating a gas phase species to generate a reactive species;
- patternwise directing the reactive species onto preselected regions of a material, the reactive species reacting with the material to increase the hydrophilicity of said preselected regions;
- and
- controlling said reacting to tailor the degree to which said preselected regions are hydrophilic, wherein:
- said irradiating includes directing ultraviolet light onto the gas phase species, and said controlling includes controlling the ultraviolet light intensity.
A method of forming regions of varying hydrophilicity, comprising:
- irradiating a gas phase species to generate a reactive species;
- patternwise directing the reactive species onto preselected regions of a material, the reactive species reacting with the material to increase the hydrophilicity of said preselected regions;
- and
- controlling said reacting to tailor the degree to which said preselected regions are hydrophilic, wherein said controlling includes selecting a temperature to which the material is heated.
A method of forming regions of varying hydrophilicity, comprising:
- irradiating a gas phase species to generate a reactive species;
- patternwise directing the reactive species onto preselected regions of a material, the reactive species reacting with the material to increase the hydrophilicity of said preselected regions;
- and
- controlling said reacting to tailor the degree to which said preselected regions are hydrophilic, wherein said controlling includes selecting the length of time for which the reactive species is exposed to the preselected regions.
A method of forming regions of varying hydrophilicity comprising:
- irradiating a gas phase species to generate a reactive species;
- patternwise directing the reactive species onto preselected regions of a material, the reactive species reacting with the material to increase the hydrophilicity of said preselected regions;
- and
- controlling said reacting to tailor the degree to which said preselected regions are hydrophilic, the material including a porogen that decomposes upon exposure to the reactive species.
A method of forming regions of varying hydrophilicity comprising:
- irradiating a gas phase species to generate a reactive species;
- patternwise directing the reactive species onto preselected regions of a material, the reactive species reacting with the material to increase the hydrophilicity of said preselected regions;
- and
- controlling said reacting to tailor the degree to which said preselected regions are hydrophilic, wherein said preselected regions form a pattern of features having a characteristic areal dimension in the range of 2–1000 microns.
Dependencies are inferred from the claim text.