Plating apparatus and method
AssigneeCanon Kabushiki Kaisha
InventorsHidetoshi Tsuzuki, Noboru Toyama, Yasuyoshi Takai, Ryo Hayashi, Yuichi Sonoda, Masumitsu Iwata, Yusuke Miyamoto
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AssigneeCanon Kabushiki Kaisha
InventorsHidetoshi Tsuzuki, Noboru Toyama, Yasuyoshi Takai, Ryo Hayashi, Yuichi Sonoda, Masumitsu Iwata, Yusuke Miyamoto
Estimating the term…
A plating apparatus includes a plating vessel for holding a plating bath containing at least metal ions, a conveying device for conveying a long conductive substrate and immersing the long conductive substrate in the plating bath, a facing electrode disposed in the plating bath so as to face one surface of the conductive substrate, a voltage application device for performing plating on the one surface of the conductive substrate by applying a voltage between the conductive substrate and the facing electrode, and a film-deposition suppression device fixedly disposed in the plating vessel so that at least a portion of the film-deposition suppression means is close to shorter-direction edges of the conductive substrate. At least a portion of the film-deposition suppression device close to the shorter-direction edges of the conductive substrate is conductive. By holding the conductive portion of the film-deposition suppression device and the conductive substrate at substantially the same potential, film deposition on the other surface of the conductive substrate is suppressed.
A plating apparatus comprising:
Dependencies are inferred from the claim text.