Manufacturing method of display device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorAtsushi Tokuda
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Abstract
A method for manufacturing a display device of the present invention includes the steps of forming insulating barriers which surround electrode and project upward from the surface of the electrode, and bringing the whole substrate into contact with water after applying the solution including an acceptor in wet process. According to the present invention, an organic conductive layer can be uniformly formed over a substrate in wet process even if the substrate does not have a smooth surface and has distribution in wettability of the surface.
Claims55
A method for manufacturing a display device comprising the steps of:
- forming a plurality of first electrodes corresponding to a plurality of pixels arranged in matrix over an insulating surface of a substrate;
- forming insulating barriers which surround the first electrodes and project upward from a surface of the first electrodes;
- forming an organic conductive layer comprising an acceptor over the insulating barriers and the first electrodes,
- forming an electroluminescent layer comprising an organic compound which is capable of emitting electroluminescent light over the organic conductive layer;
- and
- forming a second electrode over the electroluminescent layer,
- wherein a step of forming the organic conductive layer comprises:
- a first step of applying a solution or a dispersion liquid which includes the same substance as the acceptor on the first electrodes and the insulating barriers in wet process;
- a second step of bringing the first electrodes and the insulating barriers into contact with water;
- and
- a third step of applying a solution or a dispersion liquid which includes a substance for constituting the organic conductive layer in wet process.
A method for manufacturing a display device comprising the steps of:
- forming a plurality of first electrodes corresponding to a plurality of pixels arranged in matrix over an insulating surface of a substrate;
- forming insulating barriers which surround the first electrodes and project upward from a surface of the first electrodes;
- forming an organic conductive layer comprising a donor over the insulating barriers and the first electrodes;
- forming an electroluminescent layer comprising an organic compound which is capable of emitting electroluminenscent light over the organic conductive layer;
- and
- forming a second electrode over the electroluminescent layer,
- wherein a step of forming the organic conductive layer comprises:
- a first step of applying a solution or a dispersion liquid which includes the same substance as the donor in wet process on the first electrodes and the insulating barrier, and
- a second step of applying a solution or a dispersion liquid which includes a substance for constituting the organic conductive layer in wet process.
A method for manufacturing a display device comprising:
- forming an electrode over a substrate;
- forming insulating barriers surrounding the electrode over the substrate;
- applying a solution or a dispersion liquid comprising an acceptor in wet process on the electrode and the insulating barriers;
- bringing the electrode and the insulating barriers into contact with water after applying the solution or the dispersion liquid;
- and
- forming a conductive layer comprising the acceptor over the electrode and the insulating barriers in wet process,
- wherein the insulating barriers project upward from a surface of the electrode.
A method for manufacturing a display device comprising:
- forming an electrode over a substrate;
- forming an insulating material over the substrate so as to cover an edge portion of the electrode;
- applying a solution or a dispersion liquid comprising an acceptor in wet process on to electrode and the insulating material;
- bringing the electrode and the insulating material into contact with water after applying the solution or the dispersion liquid;
- and
- forming a conductive layer comprising the acceptor over the electrode and the insulating material in wet process,
- wherein the insulating material projects upward from a surface of the electrode.
A method for manufacturing a display device having a plurality of pixels arranged in matrix comprising the step of:
- forming at least one thin film transistor over a substrate;
- forming an electrode, which corresponds to one of the pixels and is electrically connected to the thin film transistor over the substrate;
- forming insulating barriers surrounding the electrode over the substrate;
- applying a solution or a dispersion liquid comprising an acceptor in wet process on the electrode and the insulating barriers;
- bringing the electrode and the insulating barriers into contact with water after applying the solution or the dispersion liquid;
- and
- forming a conductive layer comprising the acceptor over the electrode and the insulating barriers in wet process,
- wherein the insulating barriers project upward from a surface of the electrode.
A method for manufacturing a display device having a plurality of pixels arranged in matrix comprising the step of:
- forming a least one thin film transistor over a substrate;
- forming an electrode, which corresponds to one of the pixels and is electrically connected to the thin film transistor over the substrate;
- forming an insulating material over the substrate so as to cover an edge portion of the electrode;
- applying a solution or a dispersion liquid comprising an acceptor in wet process on the electrode and the insulating material;
- bringing the electrode and the insulating material into contact with water after applying the solution or the dispersion liquid;
- and
- forming a conductive layer comprising the acceptor over the electrode and the insulating material in wet process,
- wherein the insulating material projects upward from a surface of the electrode.
A method for manufacturing a display device comprising:
- forming an electrode over a substrate;
- forming insulating barriers surrounding the electrode over the substrate;
- applying a solution or a dispersion liquid comprising a donor in wet process on the electrode and the insulating barriers;
- and
- applying a solution or a dispersion liquid including a substance which constitutes a conductive layer comprising the donor over the electrode and the insulating barriers in wet process,
- wherein the insulating barriers project upward from a surface of the electrode.
A method for manufacturing a display device comprising:
- forming an electrode over a substrate;
- forming an insulating material over the substrate so as to cover an edge portion of the electrode;
- applying a solution or a dispersion liquid comprising a donor in wet process on the electrode and the insulating material;
- and
- applying a solution or a dispersion liquid including a substance which constitutes a conductive layer comprising the donor over the electrode and the insulating material in wet process,
- wherein the insulating material projects upward from a surface of the electrode.
A method for manufacturing a display device having a plurality of pixels arranged in matrix comprising the step of:
- forming at least one thin film transistor over a substrate;
- forming an electrode, which corresponds to one of the pixels and is electrically connected to the thin film transistor over the substrate;
- forming insulating barriers surrounding the electrode over the substrate;
- applying a solution or a dispersion liquid comprising a donor in wet process on the electrode and the insulating barriers;
- and
- applying a solution or a dispersion liquid including a substance which constitutes a conductive layer comprising the donor over the electrode and the insulating barriers in wet process,
- wherein the insulating barriers project upward from a surface of the electrode.
A method for manufacturing a display device having a plurality of pixels arranged in matrix comprising the step of:
- forming at least one thin film transistor over a substrate;
- forming an electrode, which corresponds to one of the pixels and is electrically connected to the thin film transistor over the substrate;
- forming an insulating material over the substrate so as to cover an edge portion of the electrode;
- applying a solution or a dispersion liquid comprising a donor in wet process on the electrode and the insulating material;
- and
- applying a solution or a dispersion liquid including a substance which constitutes a conductive layer comprising the donor over the electrode and the insulating material in wet process,
- wherein the insulating material projects upward from a surface of the electrode.
Dependencies are inferred from the claim text.