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US 7,111,512 B2Granted
Angular rate sensor
AssigneeSony Corporation
InventorsToru Matsunaga, Shigeto Watanabe, Toshiyuki Kawamura, Kazuo Kurihara, Yoshinori Satoh
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Abstract
An angular rate sensor includes a quadratic prism-like oscillator 1a formed by laminating a substrate 2 and a piezoelectric material 3, the piezoelectric material 3 is made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component, and the substrate 2 is made of a material other than PZT having physical property values equivalent to or less than PZT, which is a main component of the piezoelectric ceramics, with respect to Young's modulus, thermal expansion coefficient, and the like.
Claims5
An angular rate sensor comprising:
- a quadratic prism-like oscillator formed by laminating a substrate and a piezoelectric material,
- wherein,
- the piezoelectric material being made of piezoelectric ceramics including PZT (Lead Zirconate Titanate) as a main component,
- the substrate being made of a material other than PZT, having physical property values equivalent to or less than PZT, which is the main component of the piezoelectric ceramics, with respect to Young's modulus and thermal expansion coefficient, and
- a ratio between the thickness of the piezoelectric material and that of the oscillator is within a range of about 0.14 to about 0.27.
2 more elements
Dependencies are inferred from the claim text.