Analysis method using piezoelectric resonator
AssigneeUlvac, Inc.
InventorsAtsushi Itoh, Motoko Ichihashi
Life of this patent
Estimating the term…
Loading patent…
AssigneeUlvac, Inc.
InventorsAtsushi Itoh, Motoko Ichihashi
Estimating the term…
A piezoelectric resonator is immersed in a liquid, an AC signal is applied, and a local maximum of the conductance is determined. A frequency change due to the viscosity effect is determined from two frequencies of three frequencies including a resonance frequency that is applied at that local maximum, and first and second half-value frequencies at which a half-value conductance of half that local maximum is given. The influence of the mass effect can be eliminated, so that an accurate measurement of the viscosity change is possible. Moreover, if the substance to be analyzed that is contained in the liquid adheres to a reaction film of the piezoelectric resonator, the mass of the piezoelectric resonator changes, and the second half-value frequency is measured. It is thus possible to derive only the influence of the mass effect, since the half-value frequencies are not influenced by the viscosity effect.
An analysis method, comprising the steps of:
Dependencies are inferred from the claim text.