Method for calibrating semiconductor test instruments
AssigneeAdvantest Corporation
InventorToru Ibane
Life of this patent
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Abstract
A method for calibrating a semiconductor test instrument leading cost reduction, simplified work, and short working time. Drivers are related to comparators in one-to-one correspondence. A clock signal and a strobe signal have a one-to-one correspondence. The phase of either a clock signal or a strobe signal is adjusted with reference to the phase of the other signal. The relative phase difference between clock signals or between strobe signals are determined. The phases of the clock and strobe signals are adjusted with reference to the relative phase difference.
Claims16
A method for calibrating a semiconductor test instrument having drivers for generating signals synchronizing with clock signals and comparators for performing comparisons synchronizing with strobe signals, comprising:
- a first step of adjusting phases of said clock signals corresponding to an in-group common driver by using one of said drivers included in each group as the in-group common driver on the basis of said strobe signals corresponding to a common comparator by using one of said comparators as the common comparator while said drivers and said comparators are divided into m number of groups so that two or more of said drivers or said comparators are included;
- a second step of adjusting phases of said strobe signals corresponding to said comparator included in the same group on the basis of said clock signals corresponding to said in-group common driver in each of said m number of groups;
- and
- a third step of adjusting phases of said clock signals corresponding to said drivers included in the same group on the basis of said strobe signals corresponding to any one of said comparators in each of said m number of groups.
Dependencies are inferred from the claim text.