# US 7,106,456 B1 · Common-path point-diffraction phase-shifting interferometer > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,106,456 B1 - Document ID: US7106456B1 - Status: Granted - Kind: B1 - Application number: 10/146,156 - Filed: 2002-05-15 - Granted: 2006-09-12 - Earliest claimed: 2002-01-09 - Assignees: Interphase Technologies, Inc. - Inventors: William J. Cottrell - Web page: https://patentgrep.com/patent/US7106456B1 ## CPC - G01J 9/02: by interferometric methods (using interferometers for measuring optically the linear dimensions of objects G01B9/02) - G01M 11/005: {Testing of reflective surfaces, e.g. mirrors} - G01M 11/331: {by using interferometer} - G01M 11/333: {using modulated input signals} - G01J 2009/0223: {Common path interferometry; Point diffraction interferometry} - G01J 2009/0261: {polarised} - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) - G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR ## Abstract A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast. ## Claims ### Claim 1 A device for analyzing an incident beam, said device comprising a common-path interferometer including a device for generating a reference beam having an intensity and a separate object beam having an intensity traveling along a common axis, and further comprising an adjustable polarizer for adjusting said intensity of said object beam with respect to said intensity of said reference beam so as to be substantially equal. ### Claim 2 (depends on 1) A device as recited in claim 1, further comprising a diffractive element for generating said reference beam. ### Claim 3 (depends on 1) A dice as recited in claim 1, further including a material for providing said common axis object beam wherein said material provides a polarization shift from said reference beam. ### Claim 4 (depends on 1) A device as recited in claim 1, further comprising a modulator for shifting phase of said reference beam relative to phase of said object beam. ### Claim 5 (depends on 4) A device as recited in claim 4, wherein said modulator comprises an anisotropic electro-optic material. ### Claim 6 (depends on 4) A device as recited in claim 4, wherein said modulator has a modulation speed faster than one megahertz. ### Claim 7 (depends on 4) A device as recited in claim 4, wherein said modulator has a modulation speed faster than ten megahertz. ### Claim 8 (depends on 4) A device as recited in claim 4, wherein said modulator has a modulation speed faster than one hundred megahertz. ### Claim 9 (depends on 1) A device as recited in claim 1, wherein said device for generating comprises a half wave plate with a pinhole. ### Claim 10 A common-path point-diffraction phase-shifting interferometer comprising: a source for providing linearly polarized light having a polarization axis; a partially transmitting half wave plate with a diffractive feature, said half wave plate having a fast axis that is oriented at 45 degrees to said polarization axis, wherein said partially transmitting half wave plate generates from said light, when incident thereon, an object beam and a reference beam along a common optical axis so that said object beam has a first intensity and first polarization and said reference beam has a second intensity and second polarization; a phase modulator oriented with its axis parallel to said polarization axis; and an adjustable polarizer for adjusting said first intensity of said object beam and said second intensity of said reference beam to be substantially equal and in the same polarization state so as to generate a near unity contrast interferogram. ### Claim 11 (depends on 10) An interferometer according to claim 10, wherein said source includes a light source and a linear polarizer. ### Claim 12 (depends on 10) An interferometer according to claim 10, wherein said diffractive feature is at least one of the following: pin-hole, a column, a flat bottom well, or an embedded material different from other material included in said half wave plate. ### Claim 13 (depends on 10) An interferometer according to claim 10, wherein said embedded material includes a sphere. ### Claim 14 (depends on 10) An interferometer according to claim 10, wherein said embedded material includes a column. ### Claim 15 (depends on 10) An interferometer according to claim 10, wherein said half wave plate includes birefringent material. ### Claim 16 (depends on 10) An interferometer according to claim 10, wherein said phase modulator includes a liquid crystal material. ### Claim 17 A common-path point-diffraction phase-shifting interferometer, comprising: a light source for providing light; a partially transmitting half wave plate with a diffractive feature, wherein said partially transmitting half wave plate generates from said light, when incident thereon, an object beam and a reference beam along a common optical axis so that said object beam has a first intensity and first polarization and said reference beam has a second intensity and second polarization; a linear polarizer positioned between said light source and said partially transmitting half wave plate for linearly polarizing said light along a polarization axis; and an adjustable polarizer for adjusting said first intensity of said object beam and said second intensity of said reference beam to be nearly equal and in the same polarization state so as to generate a near unity contrast interferogram. ### Claim 18 (depends on 17) An interferometer according to claim 17, further comprising an anisotropic phase modulator having an axis oriented parallel to said polarization axis. ### Claim 19 (depends on 17) An interferometer according to claim 17, wherein said anisotropic phase modulator includes liquid crystal material. ### Claim 20 (depends on 17) An interferometer according to claim 17, said half wave plate having a fast axis that is oriented at 45 degrees to said polarization axis. ### Claim 21 A method of characterizing the shape of an optical wavefront, comprising the steps of: transmitting a beam of light through a test system; linearly polarizing the beam of light along a polarization axis either before or after transmitting it through the test system; separating said linearly polarized beam of light into an object beam and a reference beam extending along a common axis so that the object beam has a first intensity and first polarization and the reference beam has a second intensity and second polarization; and adjusting the first intensity of the object beam and the second intensity of the reference beam to be substantially equal and in the same polarization state so as to generate a near unity contrast interferogram that provides information about the shape of the optical wavefront. ### Claim 22 (depends on 21) A method according to claim 21, further including the step, after said separating step and before said adjusting step, of providing a shift in phase between said object beam and said reference beam. ### Claim 23 A method of generating an interference pattern, comprising the steps of: providing a beam of linearly polarized light having a polarization axis; generating a first beam of light having a first intensity and first polarization and a second beam of light having a second intensity and second polarization; providing a shift in phase between said first beam of light and said second beam of light; after said shifting step, combining said first and second beams of light so that they interfere with each other to create an interference pattern, wherein said combining step involves adjusting said first intensity of said first beam and said second intensity of said second beam to be substantially equal and in the same polarization state so as to generate a near unity contrast interference pattern. ### Claim 24 (depends on 23) A method according to claim 23, wherein said providing step is performed using anisotropic electro-optic material. ### Claim 25 A common-path point-diffraction phase-shifting interferometer comprising: a source for providing linearly polarized light having a polarization axis; a device that generates from said light, when incident thereon, an object beam and a reference beam along a common optical axis so that said object beam has a first intensity and first polarization and said reference beam has a second intensity and second polar ion, wherein said device is not a half wave plate; a phase modulator oriented with its axis parallel to said polarization axis; and an adjustable polarizer for adjusting said first intensity of said object beam and said second intensity of said reference beam to be substantially equal and in the same polarization state so as to generate a near unity contrast interferogram. ### Claim 26 (depends on 25) An interferometer according to claim 25, wherein said device includes a plate with a half wave well. ### Claim 27 (depends on 25) An interferometer according to claim 25, wherein said device includes a plate with a half wave column. ### Claim 28 (depends on 25) An interferometer according to claim 25, wherein said device includes a plate with a half wave sphere. ### Claim 29 (depends on 25) An interferometer according to claim 25, wherein said device includes a magneto optic material with a pinhole. ### Claim 30 (depends on 25) An interferometer according to claim 25, wherein said device includes first and second elements that together create a half wave structure, wherein said flint and second elements have a relative difference in birefringence and neither of said first and second elements is a half wave plate. ### Claim 31 (depends on 25) An interferometer according to claim 25, wherein said device includes magneto-optical material. ### Claim 32 A common-path point-diffraction phase-shifting interferometer, comprising: a light source for providing light; a device that generates from said light, when incident thereon, an object beam and a reference beam along a common optical axis so that said object beam has a first intensity and first polarization and said reference beam has a second intensity and second polarization, wherein said device is not a half wave plate; a linear polarizer positioned between said light source and said device for linearly polarizing said light along a polarization axis; and an adjustable polarizer for adjusting said first intensity of said object beam and said second intensity of said reference beam to be nearly equal and in the same polarization state so as to generate a near unity contrast interferogram. ### Claim 33 An interferometer according to clam 32, wherein said device includes a plate with a half wave well. ### Claim 34 (depends on 32) An interferometer cording to claim 32, wherein said device includes a plate with a half wave column. ### Claim 35 (depends on 32) An interferometer according to claim 32, wherein said device includes a plate with a half wave sphere. ### Claim 36 (depends on 32) An interferometer according to claim 32, wherein said device includes a magneto optic material with a pinhole. ### Claim 37 (depends on 32) An interferometer according to claim 32, wherein said device includes first and second elements that together create a half wave structure, wherein said first and second elements have a relative difference in birefringence and neither of said first and second elements is a half wave plate. ### Claim 38 An interferometer, comprising: a source of polarized light; a half wave plate having a pinhole that generates from said polarized light, when incident thereon, an object beam and a reference beam along a common optical axis so that said object beam has a first intensity and first polarization and said reference beam has a second intensity and second polarization; and an adjustable polarizer for adjusting said first intensity of said object beam and said second intensity of said reference beam to be nearly equal and in the same polarization state so as to generate a near unity contrast interferogram.