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US 7,106,454 B2Granted
Profiling complex surface structures using scanning interferometry
AssigneeZygo Corporation
InventorsPeter J. De Groot, Robert Stoner, Xavier Colonna De Lega
Life of this patent
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Abstract
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
Claims71
A method comprising:
- comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the derivable information being compared relates to a shape of the scanning interferometry signal for the first surface location of the test object.
Apparatus comprising:
- a computer readable medium having a program that causes a processor in a computer to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the derivable information being compared relates to a shape of the scanning interferometry signal for the first surface location of the test object.
Apparatus comprising:
- a scanning interferometry system configured to produce a scanning interferometry signal;
- and
- an electronic processor coupled to the scanning interferometry system to receive the scanning interferometry signal and programmed to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the derivable information being compared relates to a shape of the scanning interferometry signal for the first surface location of the test object.
1 more element
A method comprising:
- comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the series of characteristics comprises a series of characteristics of the test object at a second surface location different from the first surface location.
Apparatus comprising:
- a computer readable medium having a program that causes a processor in a computer to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the series of characteristics comprises a series of characteristics of the test object at a second surface location different from the first surface location.
Apparatus comprising:
- a scanning interferometry system configured to produce a scanning interferometry signal;
- and
- an electronic processor coupled to the scanning interferometry system to receive the scanning interferometry signal and programmed to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the series of characteristics comprises a series of characteristics of the test object at a second surface location different from the first surface location.
1 more element
A method comprising:
- chemically mechanically polishing a test object;
- collecting scanning interferometry data for a surface topography of the test object;
- and
- adjusting process conditions for the chemically mechanically polishing of the test object based on information derived from the scanning interferometry data,
- wherein adjusting the process conditions based on the information derived from the scanning interferometry data comprises comparing information derivable from the scanning interferometry signal for at least a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object.
2 more elements
Dependencies are inferred from the claim text.