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US 7,099,432 B2Granted
X-ray inspection apparatus and X-ray inspection method
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsMasaru Ichihara, Shinji Yoshino, Hiroyuki Inoue, Toshio Kinoshita, Kazuo Ohuchi
Life of this patent
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Abstract
The X-ray inspection device and the X-ray inspection method according to the present invention are configured to hold an object to be inspected irradiated with an X-ray from an X-ray irradiation device, uses a swinging device for performing swinging motion of tilting the object to be inspected at an arbitrary angle and in an arbitrary direction, images the X-ray that passes through the object to be inspected in an X-ray detection device and extracts data of a desired cross section from the X-ray image of the X-ray detection device in a control device.
Claims13
An X-ray inspection device comprising:
- an X-ray irradiation device for generating an X-ray and irradiating an object to be inspected with the X-ray;
- an X-ray detection device for detecting the X-ray radiated from said X-ray irradiation device that passes through said object to be inspected;
- a swinging device having a holding plane for holding said object to be inspected in an X-ray path from said X-ray irradiation device to said X-ray detection device and driving said holding plane at an optional angle in an optional direction with respect to an X-ray irradiation axis which is arranged on said X-ray path;
- and
- a control device for controlling driving of said swinging device and said X-ray irradiation device, receiving an input of an X-ray image data from said X-ray detection device and displaying said X-ray image data,
- wherein said holding plane is composed to swing said holding plane by rotating around two axes orthogonal to each other by an X-axis motor and a Y-axis motor, rotation by said X-axis motor is reciprocating motion reciprocating within a predetermined range of rotation angles and rotation by said Y-axis motor performs reciprocating motion of the same cycle within a predetermined range of rotation angles with the phase being shifted from the rotation of said X-axis motor.
3 more elements
An X-ray inspection device comprising:
- an X-ray irradiation device for generating an X-ray and irradiating an object to be inspected with the X-ray;
- an X-ray detection device for detecting the X-ray radiated from said X-ray irradiation device that passes through said object to be inspected;
- a swinging device having a holding plane for holding said object to be inspected in an X-ray path from said X-ray irradiation device to said X-ray detection device and driving said object to be inspected at an arbitrary angle in an arbitrary direction with respect to an X-ray irradiation axis which is arranged on said X-ray path;
- a swinging device for X-ray detection for driving said X-ray detection device in the same direction and at the same angle as said object to be inspected driven by said swinging device;
- and
- a control device for controlling driving of said swinging device and said X-ray irradiation device, receiving an input of an X-ray image data from said X-ray detection device and displaying said X-ray image data,
- wherein said holding plane is composed to swing said holding plane by rotating around two axes orthogonal to each other by an X-axis motor and a Y-axis motor, rotation by said X-axis motor is reciprocating motion reciprocating within a predetermined range of rotation angles and rotation by said Y-axis motor performs reciprocating motion of the same cycle within a predetermined range of rotation angles with the phase being shifted from the rotation of said X-axis motor.
4 more elements
An X-ray inspection device comprising:
- an X-ray irradiation device for irradiating an X-ray in the vertical direction in a form of cone with an X-ray focus as a vertex at a predetermined irradiation angle;
- a holding mechanism for horizontally holding an object to be inspected within an X-ray irradiation range
- a transfer mechanism for object to be inspected for transferring said object to be inspected held by said holding mechanism to an arbitrary position in the horizontal direction within the X-ray irradiation range;
- an X-ray detection device having a detection plane for detecting the X-ray that passes through said object to be inspected;
- a transfer mechanism for X-ray detection for transferring said X-ray detection device to an arbitrary position on a plain parallel to the plane to which said object to be inspected is transferred;
- a motor control device for controlling driving of said transfer mechanism for object to be inspected and said transfer mechanism for X-ray detection in synchronization with each other;
- an image processing device for extracting an X-ray image of an arbitrary cross section from the X-ray image formed by said X-ray detection device;
- and
- a display device for displaying said X-ray image formed by said X-ray detection device and said image processing device,
- wherein when said transfer mechanism for object to be inspected transfers said object to be inspected within the X-ray irradiation range, said transfer mechanism for object to be inspected and said transfer mechanism for X-ray detection are transferred in synchronization with each other so that a center point of said detection plane of said X-ray detection device is located on a straight line connecting said X-ray focus with a center point of an inspected place of said object to be inspected.
7 more elements
An X-ray inspection device comprising:
- an X-ray irradiation device for irradiating an X-ray in the vertical direction in a form of cone with an X-ray focus as a vertex at a predetermined irradiation angle;
- a holding mechanism for horizontally holding an object to be inspected within an X-ray irradiation range;
- a transfer mechanism for object to be inspected for transferring said object to be inspected held by said holding mechanism to an arbitrary position in the horizontal direction within an X-ray irradiation range;
- an X-ray detection device having a detection plane for detecting the X-ray that passes through said object to be inspected;
- a transfer mechanism for X-ray detection for transferring said X-ray detection device to an arbitrary position on a plain parallel to the plane to which said object to be inspected is transferred;
- a motor control device for controlling driving of said transfer mechanism for object to be inspected and said transfer mechanism for X-ray detection in synchronization with each other;
- an image processing device for extracting an X-ray image of an arbitrary cross section from the X-ray image formed by said X-ray detection device;
- and
- a display device for displaying said X-ray image formed by said X-ray detection device and said image processing device,
- wherein said transfer mechanism for object to be inspected and said transfer mechanism for X-ray detection are rotated on each horizontal plane in synchronization with each other and radiography is performed while a shutter is opened during one rotation in rotation motion.
7 more elements
An X-ray inspection device comprising:
- an X-ray irradiation device for irradiating an X-ray in the vertical direction in a form of cone with an X-ray focus as a vertex at a predetermined irradiation angle;
- a holding mechanism for horizontally holding an object to be inspected within an X-ray irradiation range;
- a transfer mechanism for object to be inspected for transferring said object to be inspected held by said holding mechanism to an arbitrary position in the horizontal direction within an X-ray irradiation range;
- an X-ray detection device having a detection plane for detecting the X-ray that passes through said object to be inspected;
- a transfer mechanism for X-ray detection for transferring said X-ray detection device to an arbitrary position on a plain parallel to the plane to which said object to be inspected is transferred;
- a motor control device for controlling driving of said transfer mechanism for object to be inspected and said transfer mechanism for X-ray detection in synchronization with each other;
- an image processing device for extracting an X-ray image of an arbitrary cross section from the X-ray image formed by said X-ray detection device;
- and
- a display device for displaying said X-ray image formed by said X-ray detection device and said image processing device,
- wherein said transfer mechanism for object to be inspected and said transfer mechanism for X-ray detection are rotated on each horizontal plane in synchronization with each other while stopping by each certain angle and radiography is performed at each stopped position.
7 more elements
An X-ray inspection method using an X-ray inspection device which comprises at least a swinging device having a holding plane for holding said object to be inspected in an X-ray path from said X-ray irradiation device to said X-ray detection device and driving said holding plane at an optional angle in an optional direction with respect to an X-ray irradiation axis which is arranged on said X-ray path, and said X-ray inspection method comprising:
- attaching an object to be inspected to a swinging device disposed on an X-ray path from an X-ray irradiation device to an X-ray detection device;
- driving said object to be inspected by said swinging device at an arbitrary angle in an arbitrary direction with respect to an X-ray irradiation axis on said X-ray path;
- irradiating said object to be inspected with the X-ray radiated from said X-ray irradiation device;
- detecting the X-ray that passes through said object to be inspected by said X-ray detection device;
- and
- receiving an input of an X-ray image data from said X-ray detection device and extracting data on an arbitrary cross section from said X-ray image data;
- wherein said holding plane to which said object to be inspected is attached is swung by two axes orthogonal to each other by an X-axis motor and a Y-axis motor, rotation by said X-axis motor is reciprocating motion reciprocating within a predetermined range of rotation angles and rotation by said Y-axis motor performs reciprocating motion of the same cycle within a predetermined range of rotation angles with the phase being shifted from the rotation of said X-axis motor.
4 more elements
An X-ray inspection method comprising:
- holding an object to be inspected horizontally within an X-ray irradiation range;
- transferring said object to be inspected held by said holding mechanism to an arbitrary position in the horizontal direction within an X-ray irradiation range;
- transferring said X-ray detection device to an arbitrary position on a plain parallel to the plane to which said object to be inspected is transferred by a transfer mechanism for X-ray detection so that a target point is located at a center of the X-ray image formed by an X-ray detection device in synchronization with the transfer of said object to be inspected;
- irradiating an X-ray in the vertical direction in a form of cone with an X-ray focus as a vertex at a predetermined irradiation angle;
- detecting the X-ray that passes through said object to be inspected by said X-ray detection device;
- in an image processing device, extracting an X-ray image of an arbitrary cross section from the X-ray image formed by said X-ray detection device;
- and
- displaying said X-ray image formed by said X-ray detection device and said image processing device,
- wherein when said transfer mechanism for object to be inspected transfers said object to be inspected within the X-ray irradiation range, said transfer mechanism for object to be inspected and said transfer mechanism for X-ray detection are transferred in synchronization with each other so that a center point of said detection plane of said X-ray detection device is located on a straight line connecting said X-ray focus with a center point of an inspected place of said object to be inspected.
6 more elements
Dependencies are inferred from the claim text.