Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device

A light source unit that generates light with a single wavelength, said light source unit comprising:

• a light generating portion that has a single wavelength laser light source and an optical modulator to generate a single wavelength pulse light having a wavelength of around 1,5μm;
• a light amplifying portion which includes at least one fiber amplifier to amplify said pulse light generated by said light generating portion;
• a light amount control unit which controls light amount emitted from said light amplifying portion by controlling a frequency of said pulse light;
• and
• a wavelength conversion portion which generates one of an eighth-harmonic wave and a tenth-harmonic wave of said pulse light having said wavelength of around 1.5μm.

A light source unit that generates light with a single wavelength, said light source unit comprising:

• a light generating portion that has a single wavelength laser light source and an optical modulator to generate a single wavelength pulse light having a wavelength of around 1.5 μm
• a light amplifying portion which includes at least one fiber amplifier to amplify said pulse light generated by said light generating portion;
• a light amount control unit which controls light amount emitted from said light amplifying portion by controlling a peak power of said pulse light;
• and
• a wavelength conversion portion which generates one of an eighth-harmonic wave and a tenth-harmonic wave of said pulse light having said wavelength of around 1.5 μm.

A light source unit, said unit comprising:

• a laser light source which oscillates a laser beam;
• a fiber amplifying portion which amplifies said laser beam from said laser light source;
• a beam monitor mechanism which monitors an optical property of said laser beam related to wavelength stabilizing to maintain a center wavelength of said laser beam to a predetermined set wavelength;
• and
• a first control unit which performs wavelength calibration based on temperature dependence data of detection reference wavelength of said beam monitor mechanism.

A light source unit, said unit comprising:

• a plurality of optical fibers;
• a polarization adjustment unit which orderly arranges a polarized state of a plurality of light beams with the same wavelength having passed through said plurality of optical fibers;
• and
• a polarized direction conversion unit which converts all light beams having passed through said plurality of optical fibers into a plurality of linearly polarized light beams that have the same polarized direction.

A wavelength stabilizing control method to maintain a center wavelength of a laser beam oscillated from a laser light source to a predetermined set wavelength, said wavelength stabilizing control method including:

• a first step of measuring in advance temperature dependence of a detection reference wavelength of a wavelength detection unit used to detect a wavelength of said laser beam;
• a second step of performing an absolute wavelength calibration to make said detection reference wavelength of said wavelength detection unit almost coincide with an absolute wavelength provided from an absolute wavelength provision source, said absolute wavelength close to said set wavelength;
• a third step of setting said detection reference wavelength of said wavelength detection unit to said set wavelength, based on said temperature dependence obtained in said first step;
• and
• a fourth step of controlling a wavelength of said laser beam from said laser light source, based on a detection result of said wavelength detection unit which said detection reference wavelength is set to said set wavelength in said third step.