Optical scanning system with correction
AssigneeMicrovision, Inc.
InventorsClarence T. Tegreene, David L. Dickensheets
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Abstract
A scanning system device has a predetermined aberration as it scans or switches light along selected optical paths. A deformable membrane receives the light and introduces an inverse “aberration” that offsets that of the scanning system. In one embodiment the scanning system includes a torsion arm that supports an oscillatory body. The torsion arm and/or body can be machined from metal, micromachined in silicon or formed in a variety of other ways. Alternatively, the scanning system may include a rotating polygonal scanner or other type of optical scanner. In another approach, an optical switch replaces the scanner.
Claims1
A scanning apparatus, comprising:
- a primary mirror that moves through a predetermined scan path at a selected scan rate having a scanning period that defines a scanning frequency;
- and
- a resonant reflector aligned to the primary mirror and being of the type that moves resonantly through a movement path at a resonant frequency, wherein the resonant frequency is an integral multiple of the scanning frequency;
- and wherein the resonant reflector comprises a deformable microelectromechanical (MEMS) reflective membrane aligned to reflect light reflected from the primary mirror and wherein the movement path includes deformation of the membrane.
Dependencies are inferred from the claim text.