Electrically-coupled micro-electro-mechanical filter systems and methods
AssigneeGeorgia Tech Research Corporation
InventorsFarrokh Avazi, Siavash Pourkamali Anaraki
Life of this patent
Estimating the term…
Abstract
An electrically-coupled micro-electro-mechanical system (MEMS) filter system and method are disclosed. In one embodiment, the MEMS filter system comprises a first microelectromechanical system (MEMS) resonator comprising a first resonating element, a second MEMS resonator comprising a second resonating element, the sescond resonating element closely spaced and mechanically separate from the first resonating element, wherein the first MEMS resonator is coupled to the second MEMS resonator through the electrostatic force acting between resonating portions of the MEMS resonators, and additional MEMS resonators electrically coupled to the first MEMS resonator, the second MEMS resonator, or the first and second MEMS resonators.
Claims18
A communications device, comprising:
- a receiver;
- and
- a microelectromechanical system (MEMS) filter system disposed in the receiver,
- the MEMS filter system comprising:
- a first filter, including:
- a first MEMS resonator and a second MEMS resonator;
- and
- a coupling element disposed between the first and the second MEMS resonators and mechanically separate from the resonating portions of the resonators, wherein the second MEMS resonator, the first MEMS resonator, and the coupling element are electrically coupled.
A microelectromechanical system (MEMS) filter system, comprising:
- a first microelectromechanical system (MEMS) resonator comprising a first resonating element;
- a second MEMS resonator comprising a second resonating element, the second resonating element closely spaced and mechanically separate from the first resonating element, wherein the first MEMS resonator is coupled to the second MEMS resonator through the electrostatic force acting between resonating portions of the MEMS resonators;
- and
- one or more additional MEMS resonators electrically coupled to the first MEMS resonator, the second MEMS resonator, or the first and second MEMS resonators.
A microelectromechanical system (MEMS) filter system, comprising:
- a first filter, including:
- a first MEMS resonator and a second MEMS resonator;
- and
- a coupling element disposed between the first and the second MEMS resonators and mechanically separate from the resonating portions of the resonators, wherein the second MEMS resonator, the first MEMS resonator, and the coupling element are electrically coupled.
A communications device, comprising:
- a receiver;
- and
- a microelectromechanical system (MEMS) filter system disposed in the receiver,
- the MEMS filter system comprising:
- a first MEMS resonator comprising a first resonating element;
- a second MEMS resonator comprising a second resonating element, the second resonating element closely spaced and mechanically separate from the first resonating element, wherein the second MEMS resonator is electrically coupled to the first MEMS resonator;
- and
- one or more additional MEMS resonators electrically coupled to the first MEMS resonator, the second MEMS resonator, or the first and second MEMS resonators.
Dependencies are inferred from the claim text.